Ulvac, Inc.

Shinnosuke Mashima

Koukou Suu

Isao Kimura

Hiroki Kobayashi

Mitsunori Henmi

Mitsutaka Hirose

A multi-layered film includes a first electroconductive layer, a dielectric layer, and a second electroconductive layer, which are sequentially layered and disposed on a main surface of a substrate. A lower surface of the dielectric layer comes into contact with an upper surface of the first electroconductive layer, an upper surface and an side surface of the dielectric layer is coated with the second electroconductive layer, and an side end of a portion at which the first electroconductive layer directly overlaps the second electroconductive layer is located inside a side end of the substrate on the main surface of the substrate.

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Chigasaki, Japan

Shinnosuke Mashima