Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,346 patents)
2 patents:
1. 6444409 - Coating and developing method
2. 6270576 - Coating and developing apparatus