Canon Kabushiki Kaisha

Shinji Tsuchida

Junichiro Hashizume

Shigenori Ueda

Hiroaki Niino

Satoshi Kojima

Makoto Aoki

Shoji Suzuki

Daisuke Tazawa

Minoru Ogata

Kazuyoshi Akiyama

Toshiyasu Shirasuna

Hitoshi Murayama

Shigeru Hiroki

Yukihiro Abe

Shunji Arai

Yuichiro Tsutsui

Michihiro Izumi

Shoichi Takashima

Osamu Hirata

Masaki Hara

Tsutomu Nishino

A vacuum processing method including placing an article to be processed in a reaction container and simultaneously supplying at least two high-frequency powers having different frequencies to the same high-frequency electrode to generate plasma in the reaction container by the high-frequency powers introduced into the reaction container from the high-frequency electrode. The frequencies and power values of the at least two high-frequency powers supplied satisfy a required relationship.

Vacuum processing apparatus in which high frequency powers having mutually different frequencies are used to generate plasma for processing an article

A vacuum processing method that includes placing an article to be processed in a reaction container and simultaneously supplying at least two high-frequency powers having mutually different frequencies to at least one high-frequency electrode to generate plasma in the reaction container by the high-frequency powers introduced into the reaction container from the high-frequency electrode(s), thereby processing the article. The frequencies and power values of the at least two high-frequency powers supplied satisfy required relationships.

Vacuum processing method and semiconductor device manufacturing method in which high-frequency powers having mutually different frequencies are applied to at least one electrode

Method and apparatus for processing image and storing medium

Electrophotographic light-receiving member and process for its production

An electrophotographic light-receiving member comprising a conductive support and provided thereon a photoconductive layer formed of a non-single-crystal material mainly composed of silicon atom and containing hydrogen atom and an element belonging to Group IIIb of the periodic table; wherein the photoconductive layer has hydrogen atom content, an optical band gap and a characteristic energy obtained from the exponential tail of light absorption spectra, all in specific ranges, and has on the surface side thereof a second layer region that absorbs a prescribed amount of light incident on the photoconductive layer and on the support side thereof the other first layer region; the element belonging to Group IIIb of the periodic table being contained in the second layer region in an amount made smaller than that in the first layer region. This can provide an electrophotographic light-receiving member that has achieved all the improvement in chargeability, the improvement in temperature characteristics thereof and the decrease in photomemory, and has been dramatically improved in image quality, and can provide an electrophotographic light-receiving member improved in temperature characteristics of sensitivity and linearity of sensitivity especially in the case where semiconductor lasers or LEDs are used.

Electrophotographic light-receiving member

An electrophotographic light-receiving member has a conductive support and a photoconductive layer composed of a non-monocrystalline material comprising silicon atoms as a matrix, hydrogen and/or halogen atoms, and an element belonging to Group IIIb of the periodic table. The photoconductive layer has from the surface side toward the conductive support side, a third layer region that absorbs 50-90% of incident image exposure light and a second layer region that absorbs 60-90% of pre-exposure light incident on the photoconductive layer. The Group IIIb element is present such that its content decreases from the conductive support side to the surface side. In three embodiments the photoconductive layer has, respectively: 10-30 at. % H; 10-20 at. % H and 25-40 at % H; an optical band gap of 1.75-1.85 eV, 1.65-1.75 eV and 1.80-1.90 eV and a characteristic energy of each of 50-55 meV.

Light-receiving member with outer layer made by alternatively forming and etching

A wireless communication apparatus automatically disconnects a communication channel between a master device and a slave device when a received electric field intensity becomes lower than a predetermined level, thereby preventing unnecessarily prolonged communication when the field intensity is excessively low. The received field intensity is detected and if in the course of communication, the reception field intensity becomes lower than a reference level a request for confirmation of the communication status is transmitted to the slave device. In accordance with the response from the slave device to the request for confirmation, the wireless channel may be disconnected.

Wireless communication apparatus

In a reactor capable of reducing an internal pressure thereof, a non-single-crystalline material layer containing at least one kind of carbon atoms, hydrogen atoms or nitrogen atoms is formed and etched on a non-single-crystalline photoconductive layer mainly composed of silicon atoms, formed on a substrate, under application of a high-frequency power of 50 MHz to 450 MHz, and the formation and the etching are alternately repeated plural times to form a surface layer. A light-receiving member having such a surface layer does not damage cleaning performance over a long period of time, hardly allows adhesion of corona discharge products, and can be free from faint images, smeared images and uneven image density even if no heating means for the drum is provided.

Process to form light-receiving member with outer layer made by

For providing a light receiving member for electrophotography improved in chargeability, temperature characteristic of sensitivity, and optical memory characteristic and presenting excellent quality of image, the light receiving member for electrophotography comprises an electrically conductive substrate and a photoconductive layer of a non-monocrystal material containing hydrogen atoms in the matrix of silicon atoms, wherein the photoconductive layer has regions formed under such conditions as to obtain a first layer region and a second layer region both having characteristic energy (Eu) of not more than 55 meV obtained from a linear portion (an exponential tail) of a function expressed by Equation (I) defined below with photon energy (h.nu.) as an independent variable and absorption coefficient (.alpha.) of photoabsorption spectrum as a dependent variable:

Light receiving member for electrophotography and fabrication process

In a plasma processing method and apparatus for carrying out plasma processing by supplying a high-frequency power of 20 MHz to 450 MHz to cause discharge to take place between a first electrode serving also as a film forming substrate and a second electrode provided so as to surround the first electrode, the high-frequency power is supplied from its power source to the second electrode at two points at least. In plasma processing apparatuses as typified by plasma CVD apparatuses to which the high-frequency power of a frequency from 20 MHz to 450 MHz is supplied, this method and apparatus can effectively decrease unevenness in plasma processing in the peripheral direction of the film formed, can promise a high plasma processing rate and can improve the characteristics of a deposited film during deposited film formation.

Plasma processing method

A light receiving member comprising a photoconductive layer disposed on an electrically conductive surface of a substrate, said photoconductive layer being constituted by a non-single crystal material containing silicon atoms as a matrix and at least one kind of atoms selected from hydrogen atoms and halogen atoms, wherein said photoconductive layer contains a plurality of layer regions which are different from each other with respect to characteristic energy at an exponential tail obtained from a light absorption spectrum, hydrogen content and optical band gap. The light receiving member exhibits excellent potential characteristics and image-forming performance for visible laser.

Light receiving member

A plasma processing apparatus has a second electrode set parallel to a first electrode to be set in a deposition chamber capable of being set in an airtight vacuum, and an RF power supply path for applying an RF power having a discharge frequency of 20 MHz to 450 MHz to the second electrode. In the plasma processing apparatus, a high-voltage capacitor having a small capacitance is arranged on the RF power supply path. With this arrangement, the plasma processing apparatus capable of uniformly, stably processing a relative large base with a plasma at a high processing speed is provided. Further, the plasma processing apparatus in which the manufacturing time can be shortened and cost can be decreased is provided.

Plasma processing apparatus

A plasma processing method and a plasma processing apparatus are provided in which a deposition film is formed, on a substrate serving also as an electrode, by application of high frequency power ranging from 20 MHz to 450 MHz with simultaneous application of DC voltage ranging from 30 to 300 V or -30 to -300 V and/or AC voltage ranging from 30 to 600 V to the substrate in an evacuatable reaction chamber. This method make it practicable to uniformize the plasma and the film thickness distribution independently of the discharge frequency and the applied high frequency power, thereby broadening the allowable range of conditions of the processing such as film formation and the allowable range of the design of the apparatus.

Plasma processing method and plasma processing apparatus

A visual telephone apparatus of the present invention is capable of deciding whether the apparatus of the other party of communication is a normal telephone apparatus or facsimile equipment by the operator who hears the data received from a connected communication medium or automatically by analysis of the procedure of controlling the communication with the apparatus of the other party, and transmitting the data obtained by photographing a subject in accordance with the communication specification corresponding to the apparatus decided, as well as receiving the data from the apparatus of the other party in accordance with the communication specification corresponding to the apparatus decided and displaying the data on a display unit. The apparatus is also capable of visual telephone communication with a visual telephone set and facsimile communication with facsimile terminal equipment.

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Zama, Japan

Shinji Tsuchida