Fuji Corporation

Fuji Machine Mfg. Co., Ltd.

Shinji Takikawa

Takeshi Nomura

Takahiro Jindo

Masayuki Oki

Naomichi Ishiura

Masaru Saito

Shinichi Kato

Toshiyuki Ikedo

Nobuo Nagasaka

Akihiro Higashida

Shigemoto Hirota

Akihiro Niwa

Wataru Kusaka

Yasuaki Imadera

Tomoko Higashida

Tomoko Niwa

In a plasma generator having a first supply port and a second supply port, in which the plasma generator includes a first supply device for supplying a first gas from the first supply port, and a second supply device connected to the first supply device so as to supply a second gas from the second supply port, a gas supply determination method includes a first supply step of causing the first supply device to start supplying the first gas in a state where the second supply device stops supplying the second gas, a first measurement step of measuring a flow rate of the gas supplied to the first supply port after the first supply step, and a first notification step of notifying a supply state of the first gas in the first supply port in accordance with a flow rate measurement result of the first measurement step.

Gas supply determination method and plasma generator

A contactless electric power supply device of the present invention is provided with: multiple supply coils and an alternating current power source arranged on a fixed section; multiple receiving coils and a receiving circuit provided on a moving body; and a face-to-face power supply section provided for each of the multiple supply coils and configured to supply alternating current power from the alternating current power source to the supply coils only when detecting a face-to-face state between the supply coil and the receiving coil; wherein separation distances and lengths in the moving direction of the multiple supply coils and multiple receiving coils are set to satisfy face-to-face conditions, and a receiving circuit converts alternating current power received by at least one of the receiving coils in the face-to-face state and generates a receiving voltage at least equal to a driving voltage.

Contactless electric power supply device

A plasma generation device includes a plasma head configured to eject plasma gas that is plasmatized, a gas supply device configured to supply gas serving as the plasma gas to the plasma head, a pair of electrodes that is provided in the plasma head, the pair of electrodes being configured to perform discharging for a part of the gas supplied from the gas supply device to generate the plasma gas, a temperature sensor that is provided in the plasma head, the temperature sensor being configured to measure a temperature of the plasma head; and a control device, in which the control device executes a cooling process of cooling the plasma head by causing the gas supply device to continue supply of the gas until the temperature sensor measures a temperature equal to or less than a predetermined value after the discharging of the pair of electrodes is stopped.

Plasma generation device and plasma head cooling method

A plasma emitting device includes plasma head configured to generate a plasmarized gas and jet the plasmarized gas so generated from a nozzle thereof, a gas supply device configured to supply a gas to the plasma head while controlling a flow rate of the gas, gas tube connecting the gas supply device with the plasma head to constitute a gas flow path, and pressure detector configured to detect a pressure of the gas supplied from the gas supply deice. Pressures of gases which are supplied to the plasma head are detected for use for various purposes, whereby the practical plasma emitting device is made up. Specifically, for example, a head clogging, which is a clog impeding a gas flow in the plasma head, can be determined without difficulty based on the detected pressure.

Plasma exposure device

It is an object of the present invention to provide a plasma generator capable of efficiently identifying the cause of an abnormal stoppage when an abnormal stoppage of the plasma generator occurs. When the controller determines that at least one detected value has become an abnormal value, the controller terminates plasma generation control. Further, in response to starting plasma generation control, the controller causes the storage section to store a history of detected values in association with time. As a result, it is possible to provide a history of detected values stored in the storage section to efficiently identify the cause of the abnormal stoppage.

Plasma generator and information processing method

A non-contact power feeding device includes multiple power feeding elements that are disposed spatially separated from one another in a movement direction, an AC power supply that supplies AC power to the power feeding elements, multiple power receiving elements that are provided in a moving body and that receive AC power in a non-contact manner, and a power receiving circuit that converts the AC power received by the power receiving elements and that outputs to an electrical load. When a length of the power feeding elements in the movement direction is LT, a separation distance between the power feeding elements is DT, a length of the power receiving elements in the movement direction is LR, and a separation distance between the power receiving elements is DR, the relationship DT&#x2264;DR and the relationship (2&#xd7;LR+DR)&#x2264;LT are satisfied.

Non-contact power feeding device

A plasma power supply device includes an AC power supply configured to generate an AC voltage of a predetermined frequency for application to a pair of electrodes by way of a power supply harness which is replaceable partially or wholly to change a wiring length and which is flexible, and a control section configured to set the predetermined frequency of the AC power supply so that the frequency becomes lower as the power supply harness becomes longer.

Power supply device for plasma, plasma device, and method for controlling power supply device for plasma

A contactless electric power supply device configured to widen a range in which power supply is possible to a moving body in a connection direction by supplying electric power from a supply coil to the moving body provided with the receiving coil in a contactless manner and connecting power supply modules provided with the supply coil, wherein, when at least one of the receiving coils is positioned to be able to receiver power from at least one of the supply coils, the contactless electric power supply device performs communication from the power supply module to an alternating module that supplies alternating current and performs communication from the alternating module to the power supply module, and causes a semiconductor switch provided on the power supply module to conduct electricity.

A non-contact power supply device of the present invention includes a power supply element provided in a power supply unit, an AC power supply circuit for supplying AC power to the power supply element, a power receiving element provided in the power receiving, a power receiving circuit for outputting a received voltage, obtained by converting AC power received by the power receiving element, to an electric load, a resonance element connected to at least one of the power supply element and the power receiving element to form a resonance circuit; a power supply substrate configured to include the AC power supply circuit, a power receiving substrate configured to include the power receiving circuit, and a resonant substrate configured to include the resonant element. The non-contact power supply device having a versatile substrate configuration can be provided for multiple types of power supply elements and power receiving elements having different characteristics.

Non-contact power supply device

A non-contact power feeding coil provided with a coil; and a core that forms a part of a circulating magnetic path that is interlinked to the coil, and used in at least one of a power feeding-side device and a power receiving-side device of a non-contact power feeding system, in which the core is configured to connect three or more core units in one row, and the core units include one or more interlinked core units that are interlinked to the coil and two non-interlinked core units that are not interlinked to the coil respectively disposed on both ends in the connection direction of the one or more interlinked core units. Thereby, it is possible to provide a non-contact power feeding coil that suppresses an increase in leakage flux.

Non-contact power feeding coil and non-contact power feeding system

A plasma-generating device capable of detecting a short circuit or electrical discharge of a cable. In response to a detection voltage detected by a current transformer becoming equal to or greater than a threshold voltage, a touchscreen panel of the plasma-generating device reports a current abnormality. When a short circuit or a discharge occurs between the first cable and the second cable, which are a pair of cables, an induced current flows through the shield member by electromagnetic induction. Therefore, the detector can detect a current abnormality due to a short circuit or electrical discharge between the first cable and the second cable.

Plasma-generating device

A power feeding coil that configures a non-contact power feeding system is provided. The power feeding coil is provided with a coil through which an AC current of a specific frequency flows, and a core that forms a section of a circulating magnetic path, which is interlinked with the coil. In the coil, a wire having an insulating covering is wound around a conductor, and a covering thickness of the insulating covering is set so that the influence of a proximity effect that occurs at the specific frequency between adjacent portions of the wire is a predetermined amount or less. According to this configuration, it is possible to freely adjust a separation distance between portions of the conductor by altering the covering thickness; and the occurrence of AC loss caused by a proximity effect may be appropriately suppressed.

An electric power supply device for supplying electric power from a supply side device to a receiver side device including a mechanism section that operates intermittently with a drive voltage and a receiver side control section that controls an operation of the mechanism section with a control voltage that is lower than the drive voltage, the electric power supply device including: a regulator section, which is provided on the receiver side device, that converts a received voltage received via an electric power supply into the control voltage; a supply voltage adjusting section, which is provided on the supply side device, that adjustably supplies the received voltage; and a supply side control section, which is provided on the supply side device, that controls the received voltage by controlling the supply voltage adjusting section.

Power supply device

A non-contact power feeding device includes a power receiving element in a power receiving-side device, a power receiving circuit that converts power received by the power receiving element, generates a motive power voltage and outputs to a motive power load, and generates a control voltage and outputs to a control load, a power feeding element that is provided in a power feeding-side device, an power supply that switches between an operational frequency during driving of the motive power load and the control load and a standby frequency during driving of the control load only, and supplies power to the power feeding element, frequency detecting sections that detect a power reception frequency of the power received by the power receiving element, and a motive power shutoff section that shuts off output of the motive power voltage when the power reception frequency changes from the operational frequency to the standby frequency.

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Nagoya, Japan

Shinji Takikawa