Other

Mitsubishi Electric Engineering Company, Limited

Shinji Shinohara

W Thomas Novak

Douglas C Watson

Yukiharu Okubo

Toshimasa Shimoda

Shinobu Tokushima

Takuma Tsuda

Hisato Fujiwara

Shinya Ishigami

Teru Hatano

A vibration detection device includes an A/D conversion unit for receiving a sine wave signal of an AE wave corresponding to vibration generated in a target machine from an AE sensor that detects the AE wave and converting the received sine wave signal into digital data, an extraction unit for extracting, from the digital data, a data point of a local maximum value for each cycle of the sine wave signal, and an output processing unit for outputting the data point extracted by the extraction unit and cycle data including data points with the number of points which can be recognized as a sine wave and including the data point of a local maximum value so that an output unit visibly outputs the data point and the cycle data.

Vibration detection device, vibration detection method, and abnormality determination system

In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.

Method of making a static pressure air bearing

Static pressure air bearing

Growing community of inventors

Tokyo, Japan

Shinji Shinohara