Screen Holdings Co., Ltd.

Dainippon Screen Mfg. Co., Ltd.

Shinji Shimizu

Masahiro Yamamoto

Koji Hashimoto

Hiroshi Horiguchi

Tatsuya Masui

Ryo Yamada

Yuichi Deba

Miwa Miyawaki

Disclosed is a substrate treating apparatus for performing a predetermined treatment on a substrate. The apparatus includes: a recipe memory unit configured to store a recipe; an imaging unit provided at a predetermined location and configured to image the component as a real image at work; a normal image memory unit configured to simulate a condition in advance where the component normally operates in response to the recipe and store in advance a normal image at this time in a view from the location in accordance with three-dimensional design information of the substrate treating apparatus; an operation controller configured to cause the predetermined treatment to be performed; and an abnormality detecting unit configured to detect an abnormality in accordance with a difference between the normal image synchronized with operation of the recipe and the real image.

Substrate treating apparatus, substrate treating system, and substrate treating method

A substrate processing apparatus collectively processes a plurality of substrates with the plurality of substrates immersing in a processing liquid. The substrate processing apparatus includes a processing tank, a camera, and a controller. The processing tank stores the processing liquid. The camera is provided vertically higher above the processing tank and captures the inside of the processing tank to generate a plurality of items of captured image data. The controller generates smoothed image data obtained by smoothing a brightness distribution of waving caused on a liquid surface of the processing liquid based on integration of the plurality of items of captured image data, and monitors the inside of the processing tank based on the smoothed image data.

Substrate processing apparatus and monitoring method in substrate processing apparatus

It is an object of the present invention to reduce the amount of data used in an apparatus, a system, and a method for performing a substrate processing. In order to achieve this object, a substrate processing apparatus includes one or more processing units each for performing a processing on a substrate and one or more arithmetic processing parts. One or more arithmetic processing parts generate a flow recipe defining a flow of a series of processings for a substrate by combining two or more processing recipes among a plurality of processing recipes each defining a processing condition relating to a processing to be performed on a substrate in the one or more processing units. The plurality of processing recipes include a plurality of liquid processing recipes each defining a condition of a processing to be performed on a substrate by using a processing liquid.

Substrate processing apparatus, substrate processing system, and substrate processing method

Even if various types of images exist together in an objective image, it is possible to sufficiently improve the quality of the image at all areas which are to be corrected. An image-correction apparatus has such a structure in which a CPU (10), an image-correction procedure part (12), a color monitor (14), a key board (16), a mouse (18), an inputting device (20), an image memory (22), an image-correction method memory (24), an outputting device (26) and the like are connected to a main bus (50). First, the CPU (10) instructs the inputting device (20) to read the objective image and store resultant data in the image memory (22), and instructs the color monitor (14) to display the objective image, using the image data which are stored. An operator then designate areas to be corrected, and selects a image-correction method which is suitable to the area from four types of image-correction methods, i.e., one for correcting a photograph, one for correcting a black letter against a white background, one for correcting a white letter against a black background and the other for correcting a thin line, while observing the screen display. The image-correction procedure part (12) executes the designated image-correction method on the designated area. The CPU (10) instructs the outputting device (26) to output an image which is expressed by image data which are obtained after execution of the image-correction procedure.

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Kyoto, Japan

Shinji Shimizu