Omron Corporation

Shinji Mizuhata

Masahiro Kurokawa

Hayami Hosokawa

Hiroyuki Inoue

Arata Nakamura

Satoru Shimokawa

Kohei Tomita

Takeshi Takakura

Nobuharu Ishikawa

Norimasa Yamanaka

Light emitted from a light source () is used through a light projection optical system () to perform coaxial down-emission lighting on a measurement target (). Light reflected by the measurement target () is formed on a photo-detector () through an image formation optical system (). Along its optical path, a spectroscope () is provided for converting an image impinging on the photo-detector () into a spectroscopic image having a predetermined wavelength band. A measurement point extraction portion () in a signal processing portion () determines a predeterm film thickness measurement point from an image picked up by the photo-detector (), extracts an image signal at the film thickness measurement point, and transmits t to film thickness operation portion (). The film thickness operation portion () measured film thickness of a thin film, which is the measurement target (), from this signal.

Optical film measuring device

Each of a detection sample object and a non-detection sample object is illuminated with S-polarization light, for instance. S-polarization light and P-polarization light reflected from each sample object are detected by different photodetecting elements. Glossiness values and light quantities of the detection and non-detection sample objects are judged based on detection outputs of the photodetecting elements, and a glossiness difference and a light quantity difference are calculated. An evaluation function having at least one of the glossiness and the light quantity as a variable is determined by using the glossiness difference and the light quantity difference. Thresholds for object discrimination are calculated based on evaluation function values of the detection and non-detection sample objects.

Reflection-type photoelectric sensing apparatus

Growing community of inventors

Fukuchiyama, Japan

Shinji Mizuhata