Sony Corporation

Sony Disc & Digital Solutions Inc.

Sony Disc Technology, Inc.

Shinji Minegishi

Sohmei Endoh

Takeshi Gouko

Takahiro Igari

Noriyuki Saito

Eijiro Kikuno

Hirofumi Sumi

Kazuhide Koyama

Yukiyasu Sugano

Makoto Tsukahara

Katsuhlsa Aratani

A recording method whereby an inorganic resist made of an incomplete oxide of a transition metal is formed as a film onto a substrate and a latent image corresponding to pits is formed onto the inorganic resist by exposure. The exposure is performed by a laser beam whose intensity has been modulated by a pulse signal whose pulse height decreases in a rear portion in a length direction of the pit, thereby forming a format of a track pitch smaller than a recording beam diameter (track pitch/exposure beam diameter=0.333 to 0.833).

Systems and methods for forming a master disk utilizing variation in an applied signal power for forming uniform pits

High density optical disc having small track pitch

Method for making an optical disc having a track pitch smaller than a recording beam diameter

An optical recording medium, with a construction and a manufacturing method thereof corresponding to those of a read-only optical recording medium and which can be manufactured inexpensively, which enables additional recording of the above-described codes, marks, and other new information, which can be recorded reliably and has satisfactory characteristics, is provided. A construction is adopted in which the optical recording medium S has an information layerincluding a portion in which information is recorded by physical shape changes in, at least, the thickness direction or the track width direction, and which comprises a reflective film; the reflective film is formed of Al alloy or Cu alloy with an electrical resistivity of 20 &#x3bc;&#x3a9;&#xb7;cm or more and 90 &#x3bc;&#x3a9;&#xb7;cm or less, and information can be additionally recorded on the reflective filmby thermal recording.

Optical recording medium, manufacturing method thereof, optical recording method, optical reproduction method, optical recording device, optical reproduction device and optical recording/reproduction device

A metallization method for improving wettability and reactivity of a titanium (Ti) based barrier metal layer with respect to an aluminum (Al) based material and simultaneously achieving high barrier properties and superior step coverage, is proposed. An operation of increasing the crystal grain size of and planarizing at least a surface region of a barrier metal layer is effected simultaneously at the time of formation of a barrier metal layer. In this manner, Al migration characteristics and reactivity on a barrier metal surface are improved so that voids are not produced when an Al-based material layer is charged into small-sized connecting hole by a process sensitive to surface morphology, such as high temperature bias sputtering. By this technique, wettability of a material layer having distinctly inferior wettability with Al, while being excellent in barrier properties, such as a TiON layer, may be improved. As a smoothing operation, bias sputtering, laser irradiation and lamp annealing are proposed. Satisfactory results have been achieved on applying these to a Ti/TiON/Ti system, a Ti/TiON system or to a Ti/TiON/TiSi.sub.2 system.

Aluminum metallization method

Growing community of inventors

Shizuoka, Japan

Shinji Minegishi