Average Co-Inventor Count = 4.44
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,346 patents)
2 patents:
1. 11380522 - Radical deactivation component, plasma processing apparatus using the same and radical deactivation method
2. 9202728 - Substrate mounting mechanism, and substrate processing apparatus