Hamamatsu-photonics K.k.

Shinji Kohyama

Takashi Inoue

Makoto Nakano

Laser lights Lto Lare relatively moved along a line to cut, while repeating a converging step of simultaneously converging the laser lights Lto Lat converging positions Pto Pseparated from each other along the line. This forms a plurality of modified spots S along the lineand causes the plurality of modified spots S to form a modified region. The converging positions Pto Pin the repeated converging steps are kept from being superposed on each other, while at least one of converging positions Pto Pin the converging step in a later stage is located between converging positions Pto Pin the converging step in an earlier stage.

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Hamamatsu, Japan

Shinji Kohyama