Ckd Corporation

Shinji Ishikawa

Michio Miyashita

Hiroyuki Murase

Tatsushi Nabei

Fumihito Tsuchiya

A fluid control valve and manufacturing method thereof, wherein, when a pressing force acts on the engagement surface between a diaphragm member and a valve seat-contacting member, the valve seat-contacting member is not displaced and no gap is formed. The diaphragm member made of a first fluorine-based resin material is provided with a diaphragm membrane and a rod-shaped part in the center of the diaphragm membrane. The valve seat-contacting member made of an injection-moldable second fluorine-based resin material is provided with a ring-shaped sealing surface and a recess on the opposite side from the ring-shaped sealing surface. The rod-shaped part is partly fitted into the recess. A ring-shaped recessed is formed on outer circumference of a portion of the rod-shaped part. A small diameter recess is formed on the inner circumference of the recess. The ring-shaped recess section and the small diameter recess adhere closely to form the engagement surface.

Fluid control valve and fluid control valve manufacturing method

A fluid control valve includes: a drive section; body provided with first port, second port, and valve seat; and valve element formed columnar-shaped and coupled with the drive section, and the valve element includes annular sealing protrusion annularly protruding from end face located on side facing the valve seat, the sealing protrusion being provided at leading end with annular sealing portion to be pressed against the valve seat for sealing and at least the annular sealing protrusion is made of fluororesin. The valve element is configured such that the annular sealing portion is radially displaced with displacement amount of no more than 6.175 &#x3bc;m when the annular sealing portion is pressed against the valve seat by the drive section so that abrasion caused by deformation of the valve element in valve closing is restrained and generation of particles is prevented.

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Kasugai, Japan

Shinji Ishikawa