Aisin Seiki Kabushiki Kaisha

Kabushiki Kaisha Shinsangyokaihatsu

Aisin Seiki Kabushiki Kaisha of Kariya

Shinji Ando

Yoshihiro Naruse

Takahiro Yamada

Wataru Nogimori

Kouichi Irisa

A micromachined pump apparatus,includes a substrate,having upper and lower surfaces and a plurality of lengthwise arranged apertures,A-,E, each of which has an upper surface opening and a lower surface opening. A plurality of diaphragms,A-,E close the upper surface openings of the apertures,A-,E, respectively. A guide plate,is fixedly mounted on the upper surface of the substrate,and defines a passage,through which an object fluid is moved by cooperating with the diaphragms on the upper surface of the substrate,. A base plate,is fixedly mounted at its upper surface on the lower surface of the substrate,, thereby enclosing an operating fluid in each of the apertures,A-,E. An electrically operated heater device,is provided on the upper surface of the base plate,for heating the fluids in the apertures,A-,E, respectively, in such a manner that whenever the fluids are heated the resultant expansion of the respective operating fluid expands the diaphragms, respectively, toward the passage. The expansions of the diaphragms,A-,E are made in sequence, thereby forcing the object fluid to move through the passage

Micromachined pump apparatus

A micro-pump is disclosed for pneumatically causing a bulging/retracting motion of a plurality of micro-diaphragms disposed in an array along a channel through which a fluid is being driven. The pump includes channel means (10) including a first port (11), a second port (12) and a flow-through space (13) providing a communication therebetween; a plurality of diaphragms (21a-21e) disposed in an array along the flow-through space (13); diaphragm support means (20) including a plurality of actuating gas spaces (22a-22e) which opposes the rear surfaces of the respective diaphragms; a plurality of reciprocatory motion means for individually imparting an oscillation of pneumatic pressure to the respective actuating gas spaces (22a-22e), and drive means for driving the reciprocatory motion means for driving motion with phase differences therebetween so that the upper dead center shifts in the direction of the array.

Pneumatically driven micro-pump

Growing community of inventors

Chiba-ken, Japan

Shinji Ando