Fujitsu Corporation

Fujitsu Semiconductor Limited

Fujitsu Microelectronics Limited

Shinichiroh Ikemasu

Narumi Okawa

Toru Anezaki

Kazutaka Yoshizawa

Taiji Ema

Shinichi Yamada

Waichiro Fujieda

Kazuo Itabashi

Junichi Mitani

Koichi Sugiyama

Yukio Hosoda

Seiichi Suzuki

Itsuo Yanagita

Kazuhiro Mizutani

A semiconductor device and its manufacture method wherein the semiconductor substrate has first and second insulating films, the first insulating film being an insulating film other than a silicon nitride film formed at least on a side wall of a conductive pattern including at least one layer of metal or metal silicide, and the second insulating film being a silicon nitride film formed to cover the first insulating film and the upper surface and side wall of the conductive pattern. The first insulating film may be formed to cover the upper surface and side wall of the conductive pattern. A semiconductor device and its manufacture method are provided which can realize high integrated DRAMs of 256 M or larger without degrading reliability and stability.

Highly integrated and reliable DRAM and its manufacture

First dummy memory cells connected to a first dummy signal line have the same shape and characteristics as those of a real memory cell. The first dummy memory cells are arranged to be adjacent to outermost real memory cells. A voltage setting circuit changes the voltage of the first dummy signal line from a first voltage to a second voltage in order to write test data onto the first dummy memory cell during a test mode. By writing data of a logic opposite to that of the test data onto the real memory cell adjacent to the first dummy memory cell by means of an operation control circuit, a leak failure that may occur between the first dummy memory cell and the real memory cell adjacent thereto can be checked.

Semiconductor memory having a dummy signal line connected to dummy memory cell

An interlayer insulation film is etched to form contact holes in an integrated circuit part. At this time, a trench is not formed in a guard ring part. Subsequently, ion implantation is carried out in source/drain regions in a peripheral circuit part for contact compensation, and high-temperature annealing is carried out in order to activate implanted impurities. Subsequently, an interlayer insulation film, a storage capacitor, and another interlayer insulation film are formed in sequence. Then, contact holes reaching a part of wiring layers are formed in the peripheral circuit part while, in the guard ring part, a trench reaching a diffusion layer is formed. Next, a barrier metal film is formed in each of the contact holes and the trench, and further, a contact plug comprising, for example, a W film is buried therein.

Semiconductor device having guard ring and manufacturing method thereof

A first insulating film consisting of an insulating material is formed on a major surface of a semiconductor substrate. On the first insulating film, a wire comprising a first conductive layer, which contains one of elemental Ti and a Ti compound, is formed. Cover films consisting of silicon nitride cover the upper surface, the bottom surface, and the side surfaces of the wire having a multilayer structure. Accordingly, a semiconductor device in which insulation defects are unlikely to occur even when the degree of integration is increased can be provided.

Semiconductor device including titanium wires and manufacturing method therefor

A semiconductor device comprises a first insulating film formed over a semiconductor substrate, a second insulating film formed on the first insulating film, a contact plug made of a conductive material vertically penetrating the first and second insulating films and extending on the second insulating film, and a conductor film in contact with the upper surface of the contact plug and part of the second insulating film. This construction makes it possible to form minute via-holes in a mass-production line without increasing parasitic capacity, increasing the number of manufacturing steps, and generating defects.

Semiconductor device and manufacturing method thereof

Highly integrated and reliable DRAM

Semiconductor memory device having electrical connection by side contact

Insulation structure for wiring which is suitable for self-aligned contact and multilevel wiring

Contact plug in capacitor device

There are contained the steps of leaving selectively the first insulating film that covers respective gate electrodes in the first region and the second region and the semiconductor substrate on side surfaces of the second gate electrode by etching back the first insulating film only in the second region, forming the second insulating film that is formed of same material as the first insulating film in the first region and the second region, forming the third insulating film whose selective etching to the first insulating film can be performed, forming holes to expose the semiconductor substrate by etching the first to third insulating films between the gate electrode in the first region, forming plugs in the holes, forming the fourth insulating film to cover the plugs and the third insulating film, forming a plurality of holes in the first region and the second region by patterning the fourth insulating film to the second insulating film.

Method of manufacturing semiconductor device

Semiconductor device and method of manufacturing the same

Growing community of inventors

Kawasaki, Japan

Shinichiroh Ikemasu