The Japan Steel Works, Ltd.

Shinichi Ono

Takashi Iwamoto

Shunroku Sukumoda

Yukio Sato

Yasushi Owaki

Koji Shinobudani

Kohtaroh Nagahara

Masayuki Kawai

Hideo Iwasawa

Yosiki Ogata

Hiroshi Tsujikawa

Masashi Tomiie

In a heat transfer pipe, annular grooves in a direction inclined at an angle of 45&deg; to 90&deg; with respect to an axis of the pipe are continuously formed at an interval in a longitudinal direction of the pipe. The annular grooves desirably have a groove depth of 0.20 mm or more, and a groove pitch of two to five times larger than the groove depth. Moreover, a ratio W/P of a bottom width W of projections of the grooves to the groove pitch P is desirably 0.1 to 0.9.

Heat transfer pipe for liquid medium having grooved inner surface and heat exchanger employing the same

In accordance with the present invention, the method of manufacturing a vacuum chamber which is used as a cluster tool, a vacuum film-forming apparatus, or the like of a manufacturing apparatus used for semiconductors, liquid crystals, solar cells, and the like, and which is formed by a vessel in which an opening (4A) is provided at one surface for forming a cover, and a hole (4) smaller than the opening (4A) is provided in an opposite surface to the opening (4A), includes the steps of:

Method for manufacturing vacuum chamber

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Muroran, Japan

Shinichi Ono