Tokyo Electron Limited

Shinichi Machidori

Masatoshi Deguchi

Toshichika Takei

Ikuo Sunaka

Daisuke Ishimaru

Hideo Funakoshi

Norifumi Sato

Shigenori Kamei

Wataru Kiyota

A substrate treatment system includes a plurality of treatment apparatuses, a position adjustment apparatus adjusting a center position of the substrate, a substrate transfer apparatus transferring the substrate to the treatment apparatuses and the position adjustment apparatus, and a control unit controlling operations of the apparatuses. The substrate transfer apparatus includes an arm part curved along a peripheral edge portion of the substrate with a radius of curvature larger than a radius of the substrate, and a holding part projecting inward from the arm part and holding a rear surface of the substrate. The position adjustment apparatus includes a mounting table which holds a central portion of the rear surface of the substrate and is rotatable and horizontally movable. The control unit controls the mounting table such that the center position of the substrate held on the mounting table is aligned with a center position of the arm part.

Substrate treatment system, substrate treatment method, and non-transitory computer storage medium

Growing community of inventors

Koshi, Japan

Shinichi Machidori