Showa Denko K.k.

Hoya Corporation

Kabushiki Kaisha Toshiba

Tohoku University

Shinichi Ishibashi

Masato Fukushima

Akira Yamane

Tomoyuki Maeda

Tsutomu Shoki

Akihiko Takeo

Migaku Takahashi

Atsushi Hashimoto

Shin Saito

Morio Hosoya

Yuzo Sasaki

Yuki Shiota

Gohei Kurokawa

Mitsuhiro Kureishi

Yoichi Usui

Akira Sakawaki

Naoyuki Imai

Manabu Ueda

Yoshiko Takahashi

Disclosed is a method of manufacturing a magnetic recording medium having a clear magnetic recording pattern through a simple process. The method includes: forming a magnetic layer on the non-magnetic substrate; forming a mask layer which covers a surface of the magnetic layer; forming a resist layer on the mask layer; patterning the resist layer using a stamp; patterning the mask layer using the resist layer, forming a recess by partially removing a portion of the magnetic layer not covered by the mask layer; forming a non-magnetic layer which covers a surface where a recess is formed; flattening a surface of the non-magnetic layer until the mask layer is exposed; removing an exposed mask layer; removing a protruding portion of the non-magnetic layer; and forming a protective layer which covers a surface where the protruding portion was removed.

Manufacturing method for magnetic recording medium, magnetic recording/reproducing device

The present invention provides a magnetic recording medium that has sufficient recording/reproducing characteristics and good write characteristics and can correspond to high recording density, and a method of manufacturing the same. A magnetic recording mediumincludes a plurality of magnetic recording patternsthat is magnetically separated from each other. Each of the magnetic recording patternsincludes a low-coercivity regionand a high-coercivity regionhaving a coercivity higher than the low-coercivity region, and the high-coercivity regionis arranged at the center of the low-coercivity regionin a plan view.

Magnetic recording medium, method of manufacturing magnetic recording medium, and magnetic recording/reproducing apparatus

Provided is a method for manufacturing, in a simple process, a magnetic recording medium having a distinct magnetic recording pattern formed thereon. A method for manufacturing a magnetic recording medium having a magnetically-separated magnetic recording pattern MP, the method at least including; a first step of forming a first magnetic layeron a non-magnetic substrate; a second step of forming a resist layeron the first magnetic layer, the resist layerbeing patterned in correspondence with the magnetic recording pattern MP; a third step of forming a second magnetic layerso as to cover a surface of the first magnetic layerhaving the resist layerformed thereon; a fourth step of removing the resist layertogether with the second magnetic layerformed thereon; and a fifth step of partially removing the first magnetic layeror partially modifying magnetic property of the first magnetic layer

Method for manufacturing magnetic recording medium and magnetic recording-reproducing apparatus

A magnetic recording medium which does not easily cause a material containing Fe or Co to corrode is disclosed. The method for manufacturing a magnetic recording mediumincludes a process of forming a magnetic layeron a non-magnetic substrate, a process of forming a recessed areain the magnetic layer, a process of forming a corrosion-resistant filmto cover an exposure surfaceof the recessed area, and a process of forming a magnetic recording pattern made of the magnetically separated magnetic layerby forming a non-magnetic layerto fill in the recessed area

Method for manufacturing a magnetic recording medium

In a perpendicular magnetic recording medium in which at least a soft magnetic underlayer, an orientation control layer, a magnetic recording layer and a protective layer are formed on a non-magnetic substrate in order from the bottom, the orientation control layer has a laminated structure of two or more layers including an intermediate layer and a seed layer which is disposed closer to the non-magnetic substrate than the intermediate layer. The seed layer includes two or more kinds of elements having a face-centered cubic structure, has face-centered cubic (111) plane crystals oriented in a direction perpendicular to a substrate surface, and has a pseudo-hexagonal structure.

Magnetic recording medium, method of manufacturing magnetic recording medium and magnetic recording reproducing apparatus

The present invention provides a magnetic recording medium which is capable of improving the perpendicular orientation of a perpendicular magnetic recording layer while maintaining a writing performance during recording and obtaining both an improvement in the perpendicular orientation and fine magnetic crystal particles with a uniform diameter, and which enables information to be recorded or reproduced at high density, a method of manufacturing the same, and a magnetic recording/reproducing apparatus. A magnetic recording mediumaccording to the present invention includes at least a soft magnetic underlayer, an orientation control layer, a magnetic recording layer, and a protective layerformed on a non-magnetic substrate. The orientation control layerhas a seed layerand an intermediate layer. The seed layeris made of a Cu&#x2014;Ti alloy that has a face-centered cubic structure and includes Cu as a main component. The Cu&#x2014;Ti alloy has a (111) crystal plane oriented substantially perpendicular to the surface of the non-magnetic substrateand has a pseudo-hexagonal structure.

Magnetic recording medium, method of manufacturing the same, and magnetic recording/reproducing apparatus

There is provided a method for manufacturing a magnetic recording medium which can easily produce a magnetic recording medium, the magnetic recording medium having a plurality of magnetically separated recording layers suitable as the recording layers in a discrete track medium or patterned medium, and also having excellent surface flatness, in which spaces between the adjacent recording layers are filled in with a non-magnetic material. Such a method for manufacturing a magnetic recording medium is a method for manufacturing a magnetic recording medium () including: a step for forming a magnetic layer on top of a non-magnetic substrate (), and then forming a resist pattern constituted of a non-magnetic material on top of the magnetic layer; a step for forming a concave section (), which is to become a separation layer (), and a plurality of recording layers () that are magnetically separated in plan view by the concave section () by removing the magnetic layer that is exposed from the resist pattern; and a step for forming the separation layer () by melting the resist pattern to prepare a melted resist and filling in the concave section () with the melted resist, followed by curing of the melted resist.

Method for manufacturing magnetic recording medium, and magnetic recording and reproducing apparatus

A reflective mask blank has a substrate () on which a reflective layer () for reflecting exposure light in a short-wavelength region including an extreme ultraviolet region and an absorber layer () for absorbing the exposure light are successively formed. The absorber layer () has an at least two-layer structure including as a lower layer an exposure light absorbing layer () formed by an absorber for the exposure light in the short-wavelength region including the extreme ultraviolet region and as an upper layer a low-reflectivity layer () formed by an absorber for inspection light used in inspection of a mask pattern. The upper layer is made of a material containing tantalum (Ta), boron (B), and nitrogen (N). The content of B is 5 at % to 30 at %. The ratio of Ta and N (Ta:N) falls within a range of 8:1 to 2:7. Alternatively, the reflective mask blank has a substrate on which a multilayer reflective film and an absorber layer are successively formed. In this case, the absorber layer is made of a material containing tantalum (Ta), boron (B), and nitrogen (N). The content of B is 5 at % to 25 at %. The ratio of Ta and N (Ta:N) falls within a range of 8:1 to 2:7.

Reflective mask blank, reflective mask and methods of producing the mask blank and the mask

A reflective mask and a reflective mask blank that can form a fine mask pattern with high accuracy in shape, achieve a sufficient contrast in a pattern inspection, and enable a pattern transfer with high accuracy. On a substrate (), a multilayer reflective film () for reflecting an exposure light, a buffer layer (), and an absorber layer for absorbing the exposure light are successively deposited in this order. This absorber layer has a layered structure composed of an uppermost layer () and a lower layer () other than it. The uppermost layer () exhibits a reflectance of 20% or less with respect to a light having an inspection wavelength for use in an inspection of a pattern formed in the absorber layer and further is formed of an inorganic material having a resistance against an etching condition in forming a pattern in the lower layer.

Growing community of inventors

Tokyo, Japan

Shinichi Ishibashi