National Institute of Advanced Industrial Science and Technology

Tazmo Co., Ltd.

Shinichi Imai

Shiro Hara

Hitoshi Maekawa

Katsuhiro Yamazoe

Kosuke Sakata

Yoshiki Nishijima

Hiroaki Tsukimoto

Kenji Hirota

Kohsaku Saino

The present invention provides a transfer robot which has a simple structure and a small occupied area in an operation. A transfer robot of the present invention includes a support member fixed to a side wall or the like, a transfer arm by which a hand member is held capable of linear movement, and first and second link members. One end portions of the first and second link members are rotatably linked to the support member, respectively. Another end portions of the first and second link members are rotatably linked to the transfer arm, respectively. The hand member holds/transfers a work. A rotational driving force applied to a linking portion between the support member and the first link member is transmitted to the transfer arm by a predetermined mechanism and linearly moves the hand member. The transfer arm moves by rotating the first link member or the second link member.

Link-type transfer robot

An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. Arms (to) of a transmission arm unit () are provided for transmitting an operation of a first parallel link () to a second parallel link (). An operation of the first parallel link () is transmitted to the second parallel link () so that an angle between an arm () and an arm () in the second parallel link() always coincides with an angle between an arm () and an arm () in the first parallel arm unit ().

Wafer transport robot

Growing community of inventors

Ibara, Japan

Shinichi Imai