Canon Kabushiki Kaisha

Valeo Systemes Thermiques

Rengo Co., Ltd.

Valeo Japan Co., Ltd.

Valeo Thermal Systems Japan Corporation

Shinichi Hara

Eiji Sakamoto

Masami Tsukamoto

Yutaka Tanaka

Nobutoshi Mizusawa

Shunichi Uzawa

Yuji Chiba

Ryuichi Ebinuma

Hiroshi Maehara

Shigeru Terashima

Takeshi Miyachi

Shin Matsui

Yutaka Watanabe

Isamu Shimoda

Mitsuaki Amemiya

Keiko Chiba

Hiroshi Kurosawa

Takayuki Hasegawa

Yoshinori Miwa

Yoshiki Kino

Mitsuji Marumo

Yasuo Hasegawa

Kunitaka Ozawa

Eigo Kawakami

Kazuyuki Kasumi

Kazunori Iwamoto

Masami Yonekawa

Koji Uda

Ryo Edo

Hideo Yokota

Noriyuki Nose

Toshinobu Tokita

Makiko Mori

Yasuaki Fukuda

Tetsuzo Mori

Hideaki Miyakawa

Hidehiko Fujioka

Akira Moriya

Hideki Nagano

Hidenao Saito

Kou Yoneda

Frederic Ladrech

Junji Hamana

Akihiko Yoshida

Toshio Tsubakida

Makoto Miyagi

Nobusige Korenaga

Naoto Hayashi

Kiyoshi Kamei

Frederic Giraud

Masumi Yamaguchi

Hisayoshi Yoshizaki

Yoshie Mizuno

Yoshie Aoki

Toru Hirabayashi

Kouichi Hara

The present invention provides a fragrance device for a vehicle capable of supplying plural fragrant ingredients to the inside of the vehicle as being contained in air flow of a vehicle-use air-conditioning device with a simple structure. The fragrance device for a vehicle according to the present invention includes a main bodyhaving a fragrance retention container, an inlet passage, an outlet passage, an inlet passage opening/closing doorand an outlet passage opening/closing door, an actuatorfixed to the main body, and a camwhich rotationally drives a rotary shaftof the inlet passage opening/closing door and a rotary shaftof the outlet passage opening/closing door.

Fragrance device for vehicle and sealing component used therein

The object of the present invention is to provide a package of a volatile substance, which comprises a bag having a volatile substance with an antibacterial action enclosed therein, and a case having the bag enclosed therein, wherein the case is allowed to have a size and shape complying with the amount of a volatile substance having permeated the bag so that the shape of the case can be adapted to the volumes and shapes of various air conditioners, while the volatile substance can be volatilized at a predetermined rate. The package of a volatile substance according to the invention comprises a source generating the volatile substance, and a case which has the volatile-substance source enclosed therein and which has a wall at least a part of which is made of a gas-permeable resin, wherein the case is characterized in that a value expressed by the formula X&#xd7;Z/Y is 200000 to 1500000 wherein X represents the surface area (mm) of the wall; Y represents the thickness (mm) of the wall; and Z represents the vaporization amount (mg/day) of the volatile substance volatilized by the volatile-substance source per day in an atmosphere at 30&#xb0; C.

Package of volatile substance and air conditioner for vehicles provided with the package

An exposure apparatus for executing an exposure of a substrate to light via a mask. The apparatus includes a booth which stores the mask in an atmospheric pressure, a processing chamber in which the exposure is executed in a first vacuum pressure, a vacuum chamber, arranged between the booth and the processing chamber, stores the mask at a second vacuum pressure that is higher than the first vacuum pressure and is between 0.1 Pa and 100 Pa, a first load lock chamber, arranged between the booth and the vacuum chamber, through which the mask is transferred, in which the atmospheric pressure and the second vacuum pressure are replaceable, and a second load lock chamber arranged between the vacuum chamber and the processing chamber, through which the mask is transferred, in which the second vacuum pressure and the first vacuum pressure are replaceable.

Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers

A processing apparatus includes a sealed vacuum chamber which contains a processing portion; a pressure controlling system which keeps the internal pressure of the sealed vacuum chamber constant at a predetermined level by exhausting the ambient gas in the sealed vacuum chamber; and an ambient gas recirculating system which recirculates the ambient gas exhausted from the sealed vacuum chamber back into the sealed vacuum chamber; wherein the ambient as recirculated by the ambient gas recirculating system is blown into the sealed vacuum chamber so that a gas flow is generated in a predetermined direction along the processing portion.

Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus

An exposure apparatus includes an optical system for guiding light to an object, a holding member for holding the object, a first refrigerator located near a holding side of the holding member without contacting the holding side, and a second refrigerator located near a backside of the holding member without contacting the backside.

Exposure apparatus

At least one exemplary embodiment is directed to an apparatus which includes an original stage, to hold an original, which moves in a scan direction, an illumination optical system configured to illuminate the original held by the original stage with exposure light, a substrate stage configured to hold a substrate and to move in a scan direction, a projection optical system configured to project a pattern of the original onto the substrate with the exposure light, and an irradiation unit configured to irradiate the original held by the original stage. Irradiation by the irradiation unit and movement of the original stage in the scan direction are carried out substantially in parallel with each other so as to remove a contaminant on the original.

Apparatus and method for removing contaminant on original, method of manufacturing device, and original

A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

Cooling apparatus

Disclosed is cooling technology in one aspect of which is a cooling system for cooling an optical member including a material having a linear expansion coefficient that becomes equal to zero at a predetermined temperature, the cooling system including a temperature detecting unit for detecting a temperature of a detection-subject portion of the optical member, a cooling unit for cooling a cooling-subject portion of the optical member, and a control unit for controlling the cooling unit on the basis of the detection by the temperature detecting unit.

Cooling system, exposure apparatus having the same, and device manufacturing method

A cooling apparatus for cooling an optical element provided in a vacuum atmosphere includes a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer, and a controller for controlling temperature of the radiation cooling part.

Cooling apparatus and method, and exposure apparatus having the cooling apparatus

Disclosed is a holding system and an exposure apparatus having the same, wherein deformation of an optical member resulting from its thermal expansion and causing degradation of imaging performance can be reduced to assure desired imaging performance. The holding system for holding an optical member includes a barrel for at least partially surrounding the optical member and/or a heat source, an average of radiation coefficient of an inside surface of the barrel is not less than 0.8.

Holding mechanism in exposure apparatus, and device manufacturing method

A cooling mechanism for cooling an optical element disposed in a vacuum atmosphere includes a support part for supporting the optical element, which has a channel having an inlet, into which gas is supplied, and an outlet, from which the gas is exhausted, and a decompression mechanism, connected to the channel, for reducing pressure of the gas to be supplied.

Cooling mechanism

Disclosed is an optical system for directing light from a light source to a predetermined plane, and it includes an optical element, a measuring mechanism for performing position measurement to a surface of the optical element, at plural measurement points on that surface, a first temperature controlling mechanism for controlling temperature of a first control region of the optical element, a second temperature controlling mechanism for controlling temperature of a second control region of the optical element, and a temperature controller for controlling the first and second temperature controlling mechanisms on the basis of the measurement made by the measuring mechanism. The proposed structure is very effective to prevent thermal deformation of the optical element due to irradiation with light, particularly in a case where only a portion of the optical element is locally irradiated with light.

Optical system for use in exposure apparatus and device manufacturing method using the same

An exposure apparatus having an exposure mode that transfers a pattern on a reticle onto an object, and a standby mode that waits for exposure includes an optical system for introducing the exposure light to the object in the exposure mode, and a mechanism for allowing the exposure light to enter the reticle and/or the optical system in the standby mode, and for preventing the exposure light from entering the object in the standby mode.

Illumination apparatus, projection exposure apparatus, and device fabrication method

Growing community of inventors

Kitasaitama-gun, Japan

Shinichi Hara