Nippon Telegraph and Telephone Corporation

Shingo Uchiyama

Makoto Sato

Fusao Shimokawa

Johji Yamaguchi

Hirofumi Morita

Hiromu Ishii

Kunihiko Sasakura

Katsuyuki Machida

Shuichiro Inagaki

Makoto Murakami

Mitsuo Usui

Naru Nemoto

Tsuyoshi Yamamoto

Koji Yamada

Etsu Hashimoto

Tai Tsuchizawa

Tohru Matsuura

Tetsufumi Shoji

Tomomi Sakata

Nobuhiro Shimoyama

Mitsuhiro Makihara

Emi Tamechika

Toshifumi Watanabe

Masato Mizukami

Jyun-ichi Takahashi

Toshifumi Konishi

A mirror device includes a mirror () which is supported to be pivotable with respect to a mirror substrate (), a driving electrode (---) which is formed on an electrode substrate () facing the mirror substrate, and an antistatic structure () which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method

A movable beam () and a movable beam () each having one end fixed to a frame portion () of a mirror substrate () are provided inside the frame portion (). The movable beam () and the movable beam () each having one end fixed to a corresponding to one of two opposite inner sides of the frame portion () are aligned at a predetermined distance on the same line in the direction in which the two sides face each other. Each of the movable beam () and the movable beam () has the other end displaceable in the normal line direction of the mirror substrate () and therefore has a cantilever structure. A mirror () is arranged between the movable beam () and the movable beam () and connected to them via a pair of connectors ().

Micromirror device and micromirror array

A MEMS device includes a mirror substrate (), an electrode substrate () arranged so as to face the mirror substrate (), a mirror () serving as a movable member rotatably supported in an opening portion of the mirror substrate () via support members, a driving electrode () arranged on an insulating film () on a surface of the electrode substrate () facing the mirror substrate () so as to face the mirror () across a gap and drive the mirror (), and a lower electrode () made of a metal or a semiconductor and formed under the insulating film () exposed to the gap so as to be in contact with the insulating film ().

MEMS device and method of manufacturing the same

A total length of members () formed in an X-axis direction of a spring () is larger than a spring length of the spring () and larger than a total length of members () formed in a Y-axis direction. With this arrangement, spring constants of respective axes can be increased, and a spring constant in a direction R can be set appropriately and freely within a wider range.

Spring, mirror device, mirror array, and optical switch

A detection means () detects optimum driving voltages of a mirror device. A correction means () corrects driving voltage values in a table () based on the optimum driving voltages. This makes it possible to drive the mirror to an optimum pivot angle even when the optimum pivot angle of the mirror changes due to, e.g., mirror drift or a change in the environment such as temperature.

Optical switch

A mirror control device includes a pivotally supported mirror (), electrodes (-) spaced apart from the mirror (), a driving voltage generation means () for generating a driving voltage corresponding to the desired tilt angle of the mirror () for each electrode, a bias voltage generation means () for generating, as a bias voltage for each electrode, a voltage which causes the tilt angle of the mirror () to have the same predetermined value upon being independently applied to each of the electrodes (-), and an electrode voltage applying means () for adding, for each electrode, the bias voltage to the driving voltage and applying the voltage after addition to a corresponding one of the electrodes (-).

Mirror control device

When a mirror () rotates with a maximum angle, a distance from the rotation center of the mirror () to the edge of the mirror () along a direction horizontal to an electrode substrate () is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (-) along the horizontal direction. Even when the mirror () rotates to come into contact with the electrode substrate (), since the electrode (-) does not exist at a position with which the mirror () comes into contact when rotating, the mirror () and the electrode (-) can be prevented from being electrodeposited.

Mirror device and mirror device manufacturing method incorporating a collision preventive structure

An optical module includes an under cladding, a first core, a second core, and an over cladding. The under cladding has a flat shape as a whole. The first core has a quadrangular cross section and is placed on the under cladding. The second core is placed on a terminal end portion of the first core. The over cladding is placed in a region including the terminal end portion of the first core and the second core placed on the terminal end portion of the first core. The under cladding and the first core placed thereon constitute a first optical waveguide. The under cladding, the terminal end portion of the first core placed on the under cladding, the second core placed thereon, and the over cladding placed on and around the second core constitute a mode field size conversion portion. The under cladding, the second core placed on the under cladding, and the over cladding placed on and around the second core constitute a second optical waveguide. The first core is made of silicon. The first and second cores differ in cross-sectional shape. A manufacturing method for the optical module is also disclosed.

Optical module and manufacturing method therefor

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Kanagawa, Japan

Shingo Uchiyama