Hitachi High-tech Science Corporation

Shingo Tsuboi

Yoshiki Matoba

Akihiro Takeda

Toshihiro Sakai

Disclosed are an X-ray transmission inspection apparatus and an inspection method using the same that are capable of preventing over-detection and erroneous detection of foreign matter even when variations in vertical position of the sample occur. The X-ray transmission inspection apparatus includes: an X-ray source () irradiating a sample with X-rays; a sample moving device () moving the sample S continuously to a predetermined direction while X-rays X are emitted from the X-ray source; a time delay integration sensor (TDI sensor) () provided opposed to the X-ray source based on the sample, and detecting the X-rays transmitted through the sample; a distance sensor () measuring a distance between the X-ray source and the sample; and a TDI controller () controlling the TDI sensor by changing a charge transfer speed of the TDI sensor () in real time based on variations in the distance measured by the distance sensor.

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Tokyo, Japan

Shingo Tsuboi