Shimadzu Corporation

Shingo Tanaka

Masaki Ohfuji

Toshifumi Hashimoto

To properly set a predetermined threshold for the number of times of occurrence of an abnormality for issuing an alarm. A vacuum pump system includes a storage, a pump controller, and a setter. The storage stores a first threshold for the number of times of occurrence of the abnormality for outputting the alarm. The pump controller counts the number of times of occurrence of the abnormality caused in a vacuum pump, determines whether or not the number of times of occurrence of the abnormality is the first threshold or more, and outputs the alarm in a case where the number of times of occurrence of the abnormality is the first threshold or more. The setter sets or changes the first threshold on the basis of an operation state of the vacuum pump.

Vacuum pump system and control method

A vacuum pump comprises: a pump main body; a heater provided at the pump main body; a power source device configured to supply power to the pump main body; a cooler provided between the pump main body and the power source device; a connection plate provided between the pump main body and the cooler; a first heat insulating plate arranged between the cooler and the connection plate; and a second heat insulating plate arranged between the pump main body and the connection plate.

Vacuum pump

A power supply integrated vacuum pump comprises: a pump housing in which a pump rotor is arranged; a power supply housing fixed to an outer surface of the pump housing; a connector configured to connect a pump-housing-side line and a power-supply-housing-side line; and a spacer fixed to the outer surface of the pump housing and having a connector fixing surface to which the connector is fixed.

Power supply integrated vacuum pump

A vacuum pump includes: a rotor that is rotated to perform evacuation; a pump disassembly detection circuit that detects a disassembled state in which the vacuum pump is disassembled; and a pump operation prohibition circuit that prohibits rotary drive of the rotor when the pump operation prohibition circuit determines that the pump disassembly detection circuit has detected the disassembled state.

Growing community of inventors

Kyoto, Japan

Shingo Tanaka