Mitutoyo Corporation

Shingo Kiyotani

Nobuhiro Ishikawa

Takao Oneta

Mitsuru Fukuda

Seiichi Otsubo

Koji Takesako

Yoshikazu Ooyama

Tetsuro Hidaka

Kengo Hirata

Kanae Kobayashi

The inspection gauge is an inspection gauge for a coordinate measuring apparatus having a triangular pyramid shape, and includes a plurality of support members in which first ends are provided at positions corresponding to vertexes of the triangular pyramid and second ends are connected to each other in a region inside the triangular pyramid, and a plurality of spheres provided at positions corresponding to the vertexes of the triangular pyramid on the plurality of support members, and at least three support members of the plurality of support members have mutually different shapes.

Inspection gauge for coordinate measuring apparatus and abnormality determination method

Inspection gauge for coordinate measuring machine

There is provided a movement mechanism including a Z spindle the posture of which is hardly changed when the Z spindle is moved upward and downward, and having less measurement errors due to hysteresis. A movement mechanism includes a Z-axis movement mechanism and an X-axis movement mechanism that moves the Z-axis movement mechanism in the horizontal direction. The Z-axis movement mechanism includes a Z spindle having a length in the vertical direction and a Z-axis drive unit that moves the Z spindle in the vertical direction. The Z-axis drive unit includes an open belt having an upper end fixed near an upper end portion of the Z spindle, and a lower end fixed to near a lower end portion of the Z spindle, a drive pulley around which the open belt wounded and that feeds and drives the open belt upward and downward, an upper tension roller that pushes the open belt against the Z spindle, and a lower tension roller that pushes the open belt against the Z spindle. A frame part of the X-axis movement mechanism supports the Z-axis drive unit at a position facing an X-axis guiding part by interposing the Z spindle.

Coordinate measuring machine

A translation movement device includes a guide, a long slider guided by the guide, and a belt driver displacing the slider; and the belt driver includes an open belt arranged parallel to the slider, a drive pulley for the open belt, and a tension bar arranged parallel to the open belt; and the tension bar is connected to the long slider at a middle position between two belt holders that hold respective end portions of the open belt.

Translation movement device employing belt drive

Motor control device includes a controller controlling a motor (a calculator controller and an electric current controller), and a detector (an electric current loop) detecting an electric current of the motor and returning the detected electric current to the controller. The electric current loop includes a first detection system, a second detection system, and an electric current calculator which sums output signals from each system. Each detection system includes a sensor detecting the electric current of the motor, and a weight adjuster outputting to the electric current calculator, a detection electric current value from each sensor multiplied by a weight coefficient.

Feedback control device

An angle detection device formed in the shape of a disk includes: a graduation plate having a plurality of graduation lines being provided radially from the center toward the circumference thereof; and two detectors being disposed along the circumference of the graduation plate in a manner to be opposite to each other in a radial direction, the detectors detecting the graduation lines. The angle detection device is configured to calculate a center error based on angles detected by the detectors.

Error calculation method for angle detection device

A surface texture measuring instrument includes: a movement-estimating unit for estimating a movement condition of a drive mechanism based on a scanning vector command issued by a scanning vector commander to calculate an estimated operation state quantity; and a correction-calculating unit for correcting a detection value of a drive sensor in accordance with the estimated operation state quantity calculated by the movement-estimating unit. The movement-estimating unit includes: a nominal-model setting unit in which a nominal model representing signal transfer function of the scanning vector command from the issuance of the scanning vector command to a reflection on a movement position of the scanning probe is stored. The correction-calculating unit includes a correction-amount calculating unit that calculates a correction amount for correcting a measurement error generated on account of deformation during the drive of the drive mechanism based on the estimated operation state quantity; and a measurement data synthesizing unit that synthesizes the detection value of the drive sensor and a detection sensor and the correction amount calculated by the correction-amount calculating unit to acquire a measurement data.

Surface texture measuring instrument

A surface-profile measuring instrument includes a movement-estimating unit that estimates a movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit to calculate an estimated movement state quantity, and a correction calculating unit that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement-estimating unit. The movement-estimating unit has a nominal model setting unit in which a nominal model from the scanning vector commanding unit to the probe is set. The correction calculating unit includes a correction-amount calculating unit that calculates a correction amount for correcting a measurement error generated by a deformation of the drive mechanism in accordance with the movement thereof and a measurement data synthesizing unit that synthesizes the detection value of the drive sensor and the displacement sensor and the calculated correction-amount calculated by the correction-amount calculating unit.

Surface-profile measuring instrument

A control device includes a first switch () by which an input signal to a motor speed control loop () is selected from a signal of a position control loop () and a signal of the speed control loop (), and a switch controller () that controls switching of the first switch (), so that the first switch () can switch between a quadruple loop (a current control loop, the motor speed control loop, the speed control loop () and the position control loop ()) with the speed control loop () embedded therein, and a triple loop (the current control loop, the motor speed control loop and the position control loop ()) without the speed control loop (), corresponding to a transient state and a steady state.

Growing community of inventors

Tsukuba, Japan

Shingo Kiyotani