Ball Wave Inc.

Toppan Printing Co., Ltd.

Other

Yamatake Corporation

Ball Semiconductor Corporation

Shingo Akao

Kazushi Yamanaka

Nobuo Takeda

Yusuke Tsukahara

Toshihiro Tsuji

Toru Oizumi

Hideyuki Fukushi

Tatsuhiro Okano

Hiroshi Matsuzawa

Osamu Koga

Ryuji Ueda

Fusao Takagi

Yusuke Onoda

Satoshi Tanaka

Nagisa Sato

Dong Youn Sim

Noritake Nakaso

Osamu Hirayama

Ichitaro Satoh

Tetsuya Miyagishi

Takamitsu Iwaya

Maki Sugawara

A system for calibrating a moisture sensor encompasses a processing unit (). The processing unit () includes a reference data obtaining LCKT (), a subject data obtaining LCKT () and a relationship calculating LCKT (). The reference data obtaining LCKT () obtains reference data, after injecting water-vapor with known concentrations into an analyzer. The subject data obtaining LCKT () measures subject data indicating temporal variation of output-responses of a subject sensor element of the analyzer under test. The relationship calculating LCKT () compares the subject data with the reference data, and calculates relationships between the output-responses of the subject sensor element and the known concentrations.

System, method and program for calibrating moisture sensor

System and method for measuring a gas concentration are provided. A ball sensor generates a collimated beam of a surface acoustic wave including fundamental wave of first frequency and harmonic wave of second frequency, which propagates through a orbital path on piezoelectric ball while passing through sensitive film to adsorb a target gas. Temperature control unit controls ball temperature of the ball sensor. Signal processing unit transmits a burst signal to sensor electrode of the ball sensor to excite the collimated beam, receives burst signals after the collimated beam has propagated a predetermined number of turns around the piezoelectric ball, and calculates the gas concentration and the ball temperature by first and second relative changes in delay times of the first and second frequencies, respectively, using waveform data of the burst signals.

System, method and computer program product for measuring gas concentration

A collimated beam () of a surface acoustic wave propagates on a piezoelectric substrate () while passing through sensitive film () to adsorb a sensing gas. Signal processing unit () transmits an exciting burst signal to sensor electrode () to excite the collimated beam (), receives first and second returned burst signals after the collimated beam () has propagated, and calculates a target gas parameter by a target leakage factor of the background gas and a relation between reference gas parameters and reference leakage factors of reference gases, the leakage factor is provided by first and second attenuations of the first and second returned burst signals, respectively, using waveform data of the first and second returned burst signals.

System, method and computer program product for gas analysis

A standard-moisture generator includes a flow controller configured to control a flow of a gas, a dryer connected to the flow controller, configured to absorb water molecules in the gas and to generate a dry gas having a background moisture, a moisture cell connected to the dryer, configured to add an object moisture to the dry gas, and a delay member connected to the moisture cell, configured to pass the dry gas with a delay time depending on a concentration of the background moisture in the dry gas.

Standard-moisture generator, system using the standard-moisture generator, method for detecting abnormality in standard-moisture and computer program product for detecting the abnormality

A metal photoetching product comprising at least one large cavity of minor axis WS, major axis WL and depth Din a surface of the product, wherein one or more cavities are included inside at least one of the at least one large cavity, and a smallest hole among the cavities has minor axis of WS, major axis WL, and depth D; and the product satisfies the following dimensions, D+D=plate thickness D, 0.02 mm&#x2266;D&#x2266;2 mm, 0.4&#xd7;D&#x3c;WS&#x3c;D, and 0.2&#xd7;D&#x3c;WS&#x3c;0.8&#xd7;D.

Metal photoetching product and production method thereof

An environment difference detector includes an elastic surface wave element equipped with a substrate including a surface having an annular surface acoustic wave circulating path, a surface acoustic wave exciting/receiving unit exciting a surface acoustic wave along the circular path and receiving the circulated surface acoustic wave, and a sensitive film disposed on the circular path to change an elastic nature in accordance with a change in an adjacent environment, a speed/intensity measuring unit measuring a circulating speed and intensity of the surface acoustic wave from an electric signal generated by the unit when the unit receives the circulating surface acoustic wave, and an environment evaluation unit evaluating an environment adjacent to the sensitive film from at least one of the circulating speed and the intensity measured by the unit.

Environment difference detector

A metal photoetching product comprising at least one large cavity of minor axis WS, major axis WL and depth Din a surface of the product, wherein one or more cavities are included inside at least one of the at least one large cavity, and a smallest hole among the cavities has minor axis of WS, major axis WL, and depth D; and the product satisfies the following dimensions, DDplate thickness D, 0.02 mm&#x2266;D&#x2266;2 mm, 0.4&#xd7;D&#x3c;WS&#x3c;D, and 0.2&#xd7;D&#x3c;WS&#x3c;0.8&#xd7;D.

Growing community of inventors

Sendai, Japan

Shingo Akao