Other

Brewer Science, Inc.

Shin-Ya Arase

Rama Puligadda

Tomoyuki Enomoto

Ken-Ichi Mizusawa

Anti-reflective coatings formed from new polymers and having high etch rates are provided. Broadly, the coatings are formed from a polymer binder and a light attenuating compound. The polymer binder has halogen atoms bonded thereto, preferably to functional groups on the polymer binder rather than to the polymer backbone. Preferred polymer binders comprise acrylic polymers while it is preferred that the halogenated functional groups of the polymer binders be dihalogenated, and more preferably trihalogenated, with chlorine, fluorine, or bromine atoms.

Growing community of inventors

Chiba, Japan

Shin-Ya Arase