Samsung Electronics Co., Ltd.

Shin-Ho Kang

Jung-woo Kim

Gyuyeol Kim

Gyu-Yeol Kim

Joon-su Ji

Sung-Yong Joo

Ka-San Ha

Won-Myung Woo

A probe card, for testing an electrical characteristic of a device under test (DUT) including a plurality of semiconductor devices, includes a substrate, a first probe pin disposed on a surface of the substrate and including a tip portion capable of contacting a pad of the DUT, and a second probe pin disposed on the surface of the substrate and including a tip portion capable of contacting the pad of the DUT. The first probe pin protrudes further than the second probe pin protrudes from the surface of the substrate in a first direction that is substantially perpendicular to the surface of the substrate.

Probe card and test apparatus including the same

A test system includes a signal generator, a plurality of transmission/reception circuits and a voltage generator. The signal generator generates a test signal. The transmission/reception circuits are connected to a plurality of transmission lines. The transmission lines each include a main line and at least one branch line connected to the main line. The transmission/reception circuits provide the test signal to the transmission lines. The transmission/reception circuits detect a response signal corresponding to the test signal. The voltage generator supplies a first reference voltage and one of the second reference voltage greater than the first reference voltage and a third reference voltage between the first reference voltage and the second reference voltage to at least one of the transmission/reception circuits.

Test system for measuring propagation delay time of transmission line

Provided is a probe card inspection apparatus including: a substrate; a first insulating layer which covers the substrate; and a first detection unit which is formed on the first insulating layer and detects physical defects of a probe of a probe card. The first detection unit includes: a ground detection unit including a first conductive pattern which defines a plurality of openings which expose a portion of the first insulating layer and detect defects of a ground probe of the probe card and; and a signal and power detection unit including a second conductive pattern which defines a plurality of openings which expose another portion of the first insulating layer and detect defects of a signal and power supply probe of the probe card.

Probe card inspection apparatus

Growing community of inventors

Suwon-si, South Korea

Shin-Ho Kang