Celerity, Inc.

Shiliang Lu

Stuart A Tison

Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a method includes providing device-specific calibration data; sensing a fluid flow; computing a measured fluid flow based on the sensed fluid flow, and correcting the measured fluid flow based on the device-specific calibration data. More particularly, the fluid flow measurement is corrected using correction factors that compensate for the use of a gas that is different from the calibration gas (CF(1+aF+bF+cF)), for device variations in sensor sensitivity (1+&#x3b1;&#x394;R), and for variations in the split flow of fluid through the flow meter (1&#x2212;&#x3b2;&#x394;ADC(Sp/100)). The sensor and split flow correction factors may be used independently of each other in some embodiments.

System and method for mass flow detection device calibration

One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.

Growing community of inventors

Plano, TX, United States of America

Shiliang Lu