Applied Materials, Inc.

Shih-Yu Liu

Jagan Rangarajan

Ricardo Martinez

Lukas Sykora

Hung X Hoang

Tarun Kumar Abichandani

Sami Mustafa

A fluid assembly includes a base and at least one first device. The base includes a single-piece body including a base outlet, a base inlet, and a first interface including a first interface inlet and a first interface outlet. The base also includes a first flow path segment formed within the single-piece body that extends from the base inlet to the first interface outlet. The base also includes a second flow path segment formed within the single-piece body that extends from first interface inlet. The base also includes a ground path disposed within the single-piece body. The first device is attachable to the first interface to fluidly connect a first device inlet to the first interface outlet and a second device outlet to the second interface inlet.

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Santa Clara, CA, United States of America

Shih-Yu Liu