Hermes-epitek Corporation

Shih-Ying Chou

Wen-Yuan Hsu

A semiconductor test apparatus includes a test chamber, a chuck and a refrigeration element. The chuck is arranged in the test chamber to fix a semiconductor element to be tested. The refrigeration element is connected to the test chamber to reduce a chamber ambient temperature of the test chamber from a first temperature to a second temperature. The foregoing semiconductor test apparatus is able to reduce the chamber ambient temperature of the test chamber to be equal to or lower than the specified test temperature.

Growing community of inventors

Hsinchu, Taiwan

Shih-Ying Chou