Fujifilm Electronic Materials U.s.a., Inc.

Fujifilm Planar Solutions, LLC

Shih-Pin Chou

Deepak Mahulikar

Abhudaya Mishra

Tamas Varga

Wen-Hung Chang

The disclosure features a system that includes a plurality of material tanks, each of which includes at least one material for forming a chemical composition and includes a first recirculation loop; at least one mixing tank in which the materials from the material tanks are mixed to form a chemical composition, the mixing tank including a second recirculation loop; and at least one holding tank configured to continuously receive the chemical composition from the mixing tank, the holding tank including a third recirculation loop. The system may further include a plurality of fluid flow controller units and be configured to form material and chemical composition flows in an in-process steady state.

Fluid processing systems including a plurality of material tanks, at least one mixing tank, at least one holding tank, and recirculation loops

This disclosure features methods of forming chemical compositions. The method includes (1) mixing a plurality of continuous material flows in a mixing tank to form a chemical composition, each continuous material flow including at least one component of the composition; and (2) moving a continuous flow of the chemical composition to a packaging station downstream of the mixing tank. The mixing and moving steps are performed continuously. This disclosure also features systems that can be used to perform such methods.

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Hsinchu, Taiwan

Shih-Pin Chou