Macronix International Co., Ltd.

Shih-Guei Yan

Wen-Jer Tsai

Chih-Chieh Cheng

Cheng-Hsien Cheng

Jyun-Siang Huang

Ping-Hung Tsai

Nan-Heng Lu

A memory structure includes a memory cell, and the memory cell includes following elements. A first gate is disposed on a substrate. A stacked structure includes a first dielectric structure, a channel layer, a second dielectric structure and a second gate disposed on the first gate, a first charge storage structure disposed in the first dielectric structure and a second charge storage structure disposed in the second dielectric structure. The first charge storage structure is a singular charge storage unit and the second charge storage structure comprises two charge storage units which are physically separated. A channel output line physically connected to the channel layer. A first dielectric layer is disposed on the first gate at two sides of the stacked structure. A first source or drain and a second source or drain are disposed on the first dielectric layer and located at two sides of the channel layer.

Method of fabricating memory structure

A memory device includes a substrate, a first doped region, composite structures, word lines, and a charge storage layer. The first doped region is disposed on a surface of the substrate. The composite structures are disposed on the first doped region. Each composite structure includes two semiconductor fin structures and a dielectric layer. Each semiconductor fin structure includes a second doped region disposed at an upper portion of the semiconductor fin structure and a body region disposed between the second doped region and the first doped region. The dielectric layer is disposed between the semiconductor fin structures. The word lines are disposed on the substrate. Each word line covers a partial sidewall and a partial top of each composite structure. The charge storage layer is disposed between the composite structures and the word lines.

Memory device and method for fabricating the same

A memory device is provided. The memory device includes a plurality of stack structures, a plurality of first stepped contacts, and a plurality of second stepped contacts. Each of the stack structures extends in a first direction, and includes a first semiconductor layer and a second semiconductor layer. The second semiconductor layer is disposed above the first semiconductor layer. Each of the first stepped contacts extends in a second direction, and a bottom surface thereof is electrically connected to the first semiconductor layers of an i+1stack structure and an i+2stack structure, wherein i is an odd number. Each of the second stepped contacts extends in the second direction, and a bottom surface thereof is electrically connected to the second semiconductor layers of an nstack structure and the i+1stack structure. The first direction is different from the second direction.

Multi level programmable memory structure

Provided is a method for fabricating a memory device, including the following steps. A plurality of semiconductor fin structures is formed on a substrate. Each semiconductor fin structure includes a first doped region and a body region on which the first doped region is disposed, and a trench is disposed between adjacent two semiconductor fin structures. A second doped region is formed in the substrate under the body regions of the semiconductor fin structures and the trenches. A plurality of first contacts are formed on the substrate. A plurality of second contacts are formed on the substrate. Each second contact is electrically connected with the corresponding first doped region.

Method for fabricating memory device

Provided is a memory cell including a substrate, two doped regions of a first conductivity type, one doped region of a second conductivity type, two stacked structures, and a first isolation structure. The doped regions of the first conductivity type are respectively disposed in the substrate. The doped region of the second conductivity type is disposed in the substrate between the two doped regions of the first conductivity type. The stacked structures are disposed on the substrate and respectively cover the corresponding doped regions of the first conductivity type and a portion of the doped region of the second conductivity type. Each of the stacked structures includes one charge storage layer. The first isolation structure completely covers and is in contact with the bottom surface of each of the doped regions of the first conductivity type and the bottom surface of the doped region of the second conductivity type.

Memory cell and manufacturing method thereof

A non-volatile memory structure, including a substrate, a plurality of stacked structures, a plurality of first conductive type doped regions, at least one second conductive type doped region, a conductive layer, and a first dielectric layer, is provided. The stacked structures are disposed on the substrate, and each of the stacked structures includes a charge storage structure. The first conductive type doped regions are disposed in the substrate under the corresponding charge storage structures respectively. The second conductive type doped region is disposed in the substrate between the adjacent charge storage structures and has an overlap region with each of the charge storage structures. The conductive layer covers the second conductive type doped region. The first dielectric layer is disposed between the conductive layer and the second conductive type doped region.

Non-volatile memory structure

A non-volatile memory and a manufacturing method thereof are provided. In this method, a first oxide layer having a protrusion is formed on a substrate. A pair of doped regions is formed in the substrate at two sides of the protrusion. A pair of charge storage spacers is formed on the sidewalls of the protrusion. A second oxide layer is formed on the first oxide layer and the pair of charge storage spacers. A conductive layer is formed on the second oxide layer, wherein the conductive layer is located completely on the top of the pair of charge storage spacers.

Manufacturing method of non-volatile memory

A method for fabricating a memory device of this invention includes at least the following steps. A tunnel dielectric layer is formed over a substrate. A gate is fowled over the tunnel dielectric layer. At least one charge storage layer is formed between the gate and the tunnel dielectric layer. Two doped regions are formed in the substrate beside the gate. A word line is formed on and electrically connected to the gate, wherein the word line having a thickness greater than a thickness of the gate.

Method of fabricating memory device with charge storage layer at gap located side of gate dielectric underneath the gate

A semiconductor structure uses its control gate to be the wordline for receiving an operation voltage for the semiconductor structure. The semiconductor structure has a first and a second doped region and a buried channel between the first and the second doped region, wherein the buried channel has a first length along the first direction. The semiconductor structure further has a charge trapping layer stack on the buried channel and a conductive layer on the charge trapping layer stack, wherein the conductive layer extends along the first direction. The conductive layer is configured as both the control gate and the wordline of the semiconductor structure.

Structure and manufacturing method of a non-volatile memory

Provided is a memory device including a first dielectric layer, a T-shaped gate, two charge storage layers and two second dielectric layers. The first dielectric layer is disposed on a substrate. The T-shaped gate is disposed on the first dielectric layer and has an upper gate and a lower gate, wherein two gaps are present respectively at both sides of the lower gate and between the upper gate and the substrate. The charge storage layers are respectively embedded into the gaps. A second dielectric layer is disposed between each charge storage layer and the upper gate, between each charge storage layer and the lower gate and between each charge storage layer and the substrate.

Memory device and method of forming the same

A fabricating method for fabricating a non-volatile memory structure including the following steps is provided. A first conductive type doped layer is formed in a substrate. A plurality of stacked structures is formed on the substrate, and each of the stacked structures includes a charge storage structure. A first dielectric layer is formed on the substrate between the adjacent stacked structures. A second conductive type doped region is formed in the substrate between the adjacent charge storage structures. The second conductive type doped region has an overlap region with each of the charge storage structures. In addition, the second conductive type doped region divides the first conductive type doped layer into a plurality of first conductive type doped regions that are separated from each other. A conductive layer is formed on the first dielectric layer.

Fabricating method of non-volatile memory structure

A memory structure including a memory cell is provided, and the memory cell includes following elements. A first gate is disposed on a substrate. A stacked structure includes a first dielectric structure, a channel layer, a second dielectric structure and a second gate disposed on the first gate, a first charge storage structure disposed in the first dielectric structure and a second charge storage structure disposed in the second dielectric structure. At least one of the first charge storage structure and the second charge storage structure includes two charge storage units which are physically separated. A first dielectric layer is disposed on the first gate at two sides of the stacked structure. A first source and drain and a second source and drain are disposed on the first dielectric layer and located at two sides of the channel layer.

Multi level programmable memory structure with multiple charge storage structures and fabricating method thereof

A non-volatile memory and a manufacturing method thereof are provided. A first oxide layer having a protrusion is formed on a substrate. A pair of doped regions is formed in the substrate at two sides of the protrusion. A pair of charge storage spacers is formed on the sidewalls of the protrusion. A second oxide layer is formed on the first oxide layer and the charge storage spacers. A conductive layer is formed on the second oxide layer.

Non-volatile memory

A memory device is described, including a tunnel dielectric layer over a substrate, a gate over the tunnel dielectric layer, at least one charge storage layer between the gate and the tunnel dielectric layer, two doped regions in the substrate beside the gate, and a word line that is disposed on and electrically connected to the gate and has a thickness greater than that of the gate.

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Hsinchu, Taiwan

Shih-Guei Yan