Macronix International Co., Ltd.

Shih-Chin Lee

Yen-Hao Shih

Erh-Kun Lai

Jung-Yu Hsieh

Hsiang-Lan Lung

Kuang Yeu Hsieh

Shih-Ping Hong

ChiaHua Ho

Tzung-Ting Han

Kuang-Yeu Hsieh

Hong-Ji Lee

Ming-Shang Chen

Chia-Hua Ho

Chia-Wei Wu

Wen-Pin Lu

Shaw-Hung Ku

Min-Ta Wu

Shang-Wei Lin

Li-Wei Wang

Fu-Xing Zhou

An integrated circuit structure includes a substrate, a conductive layer, a plurality of memory devices, a bonding pad, and a source line. The conductive layer is over the substrate. The memory devices are stacked in a vertical direction over the conductive layer. The bonding pad is over the conductive layer. The source line extends upwardly from the bonding pad and has a lower portion inlaid in the bonding pad and an upper portion having a sidewall coterminous with a sidewall of the bonding pad. A top end of the source line has a first lateral dimension greater than a second lateral dimension of the bonding pad.

Memory device with source line over a bonding pad

A non-volatile memory structure including a substrate, stacked patterns and stress patterns is provided. The stacked patterns are disposed on the substrate. Each of the stacked patterns includes a charge storage structure and a gate from bottom to top. Here, the charge storage structure at least includes a charge storage layer. The stress patterns are disposed on the substrate between the two adjacent stacked patterns, respectively.

Non-volatile memory structure including stress material between stacked patterns

Memory cells comprising: a semiconductor substrate having at least two source/drain regions separated by a channel region; a charge-trapping structure disposed above the channel region; and a gate disposed above the charge-trapping structure; wherein the charge-trapping structure comprises a bottom insulating layer, a first charge-trapping layer, and a second charge-trapping layer, wherein an interface between the bottom insulating layer and the substrate has a hydrogen concentration of less than about 3&#xd7;10/cm, and methods for forming such memory cells.

Methods of forming low hydrogen concentration charge-trapping layer structures for non-volatile memory

A MOSFET fabrication process comprises nitridation of the dielectric silicon interface so that silicon-dangling bonds are connected with nitrogen atoms creating silicon&#x2014;nitrogen bonds, which are stronger than silicon-hydrogen bonds. A tunnel dielectric is formed on the substrate. A nitride layer is then formed over the tunnel dielectric layer. The top of the nitride layer is then converted to an oxide and the interface between the substrate and the tunnel dielectric is nitrided simultaneously with conversion of the nitride layer to oxide.

Method for nitridation of the interface between a dielectric and a substrate in a MOS device

A method of fabricating a non-volatile memory device at least comprises steps as follows. First, a substrate on which a bottom dielectric layer is formed is provided. Then, impurities are introduced through the bottom dielectric layer to the substrate, so as to form a plurality of spaced doped regions on the substrate. The structure is thermally annealed for pushing the spaced doped regions to diffuse outwardly. After annealing, a charge trapping layer is formed on the bottom dielectric layer, and a top dielectric layer is formed on the charge trapping layer. Finally, a gate structure (such as a polysilicon layer and a silicide) is formed on the top dielectric layer.

ONO formation of semiconductor memory device and method of fabricating the same

Methods of forming charge-trapping dielectric layer structures in semiconductor memory devices which comprise: (a) providing a semiconductor substrate; (b) forming an oxide layer on at least a portion of the substrate; (c) forming two or more source/drain regions in the substrate below the oxide layer; (d) re-oxidizing the oxide layer; (e) forming a charge-trapping dielectric layer on the oxide layer; and (f) forming an insulating layer on the charge-trapping dielectric layer; as well as methods which comprise: (a) providing a semiconductor substrate; (b) forming an oxide layer on at least a portion of the substrate in a dry atmosphere; (c) forming two or more source/drain regions in the substrate below the oxide layer; (d) forming a charge-trapping dielectric layer on the oxide layer; (e) forming an insulating layer on the charge-trapping dielectric layer; and (f) annealing the insulating layer in an atmosphere having a hydrogen content of less than about 0.01% are described.

Methods of forming charge-trapping dielectric layers for semiconductor memory devices

An one-time programmable read only memory is provided. An N-type doping region and a first P-type doping layer are disposed in a P-type semiconductor substrate sequentially. A second P-type doping layer is disposed between the first P-type doping layer and the N-type doping region. The second P-type doping layer with higher doping level, which has a linear structure, is served as a bit line. An electrically conductive layer is disposed over the P-type semiconductor substrate. The electrically conductive layer also has a linear structure that crosses over the first P-type doping layer. The first N-type doping layer is disposed in the P-type semiconductor substrate between the electrically conductive layer and the first P-type doping layer. The arrangement of N-type and P-type doping layer is used to be selective diode device. An anti-fuse layer is disposed between the electrically conductive layer and the first N-type doping layer.

Manufacturing method of one-time programmable read only memory

One-time programmable read only memory and manufacturing method thereof

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Hsinchu, Taiwan

Shih-Chin Lee