Taiwan Semiconductor Manufacturing Comp. Ltd.

Tsinghua University

National Yang Ming Chiao Tung University

Shih-Chieh Wu

Mei-Yun Wang

Kuo-Yi Chao

Pang-Chi Wu

Bao-Ru Young

Tung-Heng Hsieh

Hsien-Huang Liao

Fu-Kai Yang

Kai-Hsuan Lee

I-Wen Wu

Po-Yu Huang

Chen-Ming Lee

Shih-Che Lin

Chao-Hsun Wang

Yuan-Tien Tu

Tuo-Hung Hou

Yi-Chun Chang

Wang-Jung Hsueh

Chun-Yao Wang

Jan-An Hsieh

A semiconductor structure includes a substrate, nanostructures over the substrate, and a gate structure wrapping around the nanostructures. The gate structure includes a gate dielectric layer and a gate electrode wrapping around the gate dielectric layer. The semiconductor structure further includes a source/drain feature in contact with the nanostructures, a contact etch stop layer over the source/drain feature, and a seal layer over the air spacer and the gate structure, and on a sidewall of the contact etch stop layer. The contact etch stop layer is separated from the gate structure by an air spacer.

Semiconductor structure and method for manufacturing the same

Semiconductor structures and methods are provided. An exemplary method according to the present disclosure includes receiving a fin-shaped structure comprising a first channel region and a second channel region, a first and a second dummy gate structures disposed over the first and the second channel regions, respectively. The method also includes removing a portion of the first dummy gate structure, a portion of the first channel region and a portion of the substrate under the first dummy gate structure to form a trench, forming a hybrid dielectric feature in the trench, removing a portion of the hybrid dielectric feature to form an air gap, sealing the air gap, and replacing the second dummy gate structure with a gate stack after sealing the air gap.

Isolation structures

In an embodiment, a method includes: forming a first fin extending from a substrate; forming a second fin extending from the substrate, the second fin being spaced apart from the first fin by a first distance; forming a metal gate stack over the first fin and the second fin; depositing a first inter-layer dielectric over the metal gate stack; and forming a gate contact extending through the first inter-layer dielectric to physically contact the metal gate stack, the gate contact being laterally disposed between the first fin and the second fin, the gate contact being spaced apart from the first fin by a second distance, where the second distance is less than a second predetermined threshold when the first distance is greater than or equal to a first predetermined threshold.

Semiconductor devices

A semiconductor device structure and a method for forming a semiconductor device structure are provided. The semiconductor device structure includes a metal gate stack over a substrate and an epitaxial structure over the substrate. The semiconductor device structure also includes a conductive contact electrically connected to the epitaxial structure. A topmost surface of the metal gate stack is vertically disposed between a topmost surface of the conductive contact and a bottommost surface of the conductive contact. The semiconductor device structure further includes a first conductive via electrically connected to the metal gate stack. The topmost surface of the conductive contact is vertically disposed between a topmost surface of the first conductive via and a bottommost surface of the first conductive via. In addition, the semiconductor device structure includes a second conductive via electrically connected to the conductive contact.

Structure and formation method of semiconductor device with contact structures

A semiconductor device structure includes nanostructures formed over a substrate. The structure also includes a gate structure formed over and around the nanostructures. The structure also includes a spacer layer formed over a sidewall of the gate structure over the nanostructures. The structure also includes a source/drain epitaxial structure formed adjacent to the spacer layer. The structure also includes a contact structure formed over the source/drain epitaxial structure with an air spacer formed between the spacer layer and the contact structure.

Semiconductor device structure and method for forming the same

A semiconductor device structure is provided. The semiconductor device structure includes a source/drain region formed in a semiconductor substrate, a source/drain contact structure formed over the source/drain region, and a gate electrode layer formed adjacent to the source/drain contact structure. The semiconductor device structure also includes a first spacer and a second spacer laterally and successively arranged from the sidewall of the gate electrode layer to the sidewall of the source/drain contact structure. The semiconductor device structure further includes a silicide region formed in the source/drain region. The top width of the silicide region is greater than the bottom width of the source/drain contact structure and less than the top width of the source/drain region.

Contact structure with silicide and method for forming the same

Semiconductor device and method

This invention proposes a multi-bit resistive-switching memory cell and array thereof. Multiple conduction paths are formed on each memory cell and independent of each other, and each conduction path can be in a high-resistance or low-resistance state, so as to form a multi-bit resistive-switching memory cell. A memory cell array can be formed by arranging a plurality of multi-bit resistive-switching memory cells, and the memory cell array provides a simple, high density, high performance and cost-efficient proposal.

Multi-bit resistive-switching memory cell and array

A method for verifying a circuit design includes a step of assigning numerical values 1/ato input ports of the circuit design according to a function a=(a&#x2212;1)+1, wherein i represents the number of the input port and the numerical value ais not equal to 2 or 1. Preferably, ais equal to or larger than 3, and is a positive integer. Particularly, the numerical value represents l's probability. In addition, the present method further includes a step of calculating an output value at an output port of the circuit design based on the numerical values assigned to the input port, and calculating the output value is performed from the input port to the output port at a Boolean gate level.

Method for verifying a circuit design by assigning numerical values to inputs of the circuit design

Growing community of inventors

Hsinchu, Taiwan

Shih-Chieh Wu