Industrial Technology Research Institute

Shih-Che Lo

Ming-Jye Tsai

Tung-Chuan Wu

Ray-Ten Chen

Yun-Hui Chang

Jian-Shian Lin

Shih-Chou Chen

Wen-Syang Hsu

Yi-Ming Chu

Ching-Tang Yang

Hsi-Hsiang Lin

Din-Ping Tsai

Chi-Wen Yang

Yuan-Ying Lu

Rou-Fu Chou

Hsi-Fu Lin

The present invention is to disclose a SIL near-field flying head flying state control structure in which the SIL is installed in a lens holder that can be biased. The lens holder includes three detection points spaced around the SIL for detecting the distance between each detection point and an optical disk, and a number of single-axis displacement devices for controlling the corresponding lateral side of the lens holder to move axially relative to the optical disk. A server can control the single-axis displacement devices to adjust the posture of the lens holder subject to the distance between each detection point and the optical disk measured, keeping the parallelism between the SIL and the optical disk within a predetermined level.

SIL near-field flying head structure to control gap between disc and SIL with three sensor points in front of lens holder

A tapping mode atomic force microscope includes a sinusoidal signal generator. The sinusoidal signal generator generates sinusoidal wave signals to a modulating laser diode for outputting a pulsed laser beam. The laser beam reflects from the back side of a photo detector and then a current signal with a corresponding intensity is output b y the photo detector. Then, the signal is converted by a current to voltage converter and then is operated by a differential amplifier. After the DC component and the undesired multiple frequency harmonics of the current signal is filtered by a band pass filter, the current signal is processed by a demodulation circuit and a low pass filter to produce a voltage value corresponding to probe deformation. After inputting this voltage value to a Z-axis servo controller, a corresponding control command is acquired based on a control algorithm so as to keep the value of the probe deformation constant. If the position of the Z-axis is recorded at a specific time point and all the data are collected, the surface profile of the test sample can be obtained.

Atomic force microscope

A knock mode scanning near-field optical microscope comprises a light source member, an optical fiber probe connected at one end thereof with the light source member such that other end of the optical fiber probe forms a near-field point source of light, and that the optical fiber probe is attached with one end of a suspension arm member of an oscillation member. The oscillation member further has a piezoelectric ceramics, which is disposed on the suspension arm member, and is driven by a harmonic wave signal by a signal feedback member so as to bring about a change in amplitude and phase of the optical fiber probe in order to result in a feedback control.

Knock mode scanning near-field optical microscope

A method for making a probe device makes use of the main shaft of an electrodischarge machining machine to mount thereon a probe for effecting the drilling operation of a PCB board. Upon completion of the drilling operation, the probe is severed and then fastened with the PCB board.

Method for making a probe device having detective function

The present invention discloses a planar microprobe and method of manufacturing the same. The present invention utilizes semiconductor process technologies that includes electroplating technology and sacrificial layer technology to integrate constituent elements on a silicon wafer having an insulator layer. The planar microprobe comprises: an upper cantilever beam including a first electrode; a supporting pad coupled to the upper cantilever beam; and a lower cantilever beam coupled to the supporting pad, situated below the upper cantilever beam and spaced by a distance from the upper cantilever beam. Besides, the lower cantilever beam comprises: a second electrode in cooperation with the first electrode to control a vertical displacement of the lower cantilever beam by applying an external voltage thereto. A tip is coupled to the second electrode. The microprobe is manufactured by depositing a photoresist sacrificial layer on a lower cantilever beam. Metal is electroplated to form an upper cantilever beam. Then, residual silicon, silicon oxide and photoresist are etched to release the microprobe.

Manufacturing method for planar microprobe including electrostatic

An electrode plate for use in an ozone generator containing a plurality of air vents. It includes: (a) a cathode electrode connected to a low voltage terminal and having a plurality of discharge portions at one side; (b) an anode electrode connected to a high voltage terminal for acting with the cathode electrode; and (c) an insulative layer sandwiched between the cathode electrode and the anode electrode, keeping the discharge portions to be spaced from the anode electrode within hundred micrometers. The cathode electrode and the anode electrode each comprises a plurality of air vents arranged in a staggered manner.

Electrode plate for use in ozone generators with staggered air vents

An integrated ozone generator is disclosed. It includes: (a) an upper covering layer having a thin film, and a permanent magnet being installed on the thin film, the permanent magnet having a periphery which is surrounded with a coil on which a plurality of contact points are installed for inputting an oscillating signal, so as to form an electromagnetically actuating micro pump, the upper covering layer further having a hole formed on a first side of the upper covering layer and an upper thin film electrode and a discharging teethed structure installed on an inside surface of the covering layer away from the hole; and (b) a base having a groove which is connected with an inner hole of the upper covering layer to form a gas chamber, a gradually opened channel at one side of the gas chamber for inputting gas, and another gradually reducing channel at another side of the gas chamber. The base also contains a lower thin film electrode connected to the gradually reducing channel and a plurality of discharging micro tips being installed inside the base at a position corresponding to the lower thin film electrode, the lower thin film electrode being positioned opposite to the upper electrode thin film inside the upper covering layer and the discharging micro tips which are installed on either the upper thin film electrode or the lower thin film electrode, or both, to form an arc discharging structure.

Ozone generator having micro pump

The present invention relates to an ozone generating device, comprising: a main body, having a cavity, on the lateral sides further having a plurality of inlet holes, which connect the cavity to the exterior to let in air, and on the top side having a plurality of outlet holes, which connect the cavity to the exterior to let out air with ozone; two electrodes, attached to the bottom and the top side of the cavity, for generating an electric discharge, so as to generate ozone in the cavity; and a heating device, installed below the electrode at the bottom side of the cavity, so as to heat the electrode and, indirectly, air in the cavity; wherein heating the first electrode by the heating device allows the operating voltage for generating an electric discharge to be reduced and heating the air with ozone within the cavity causes it to drift upward and to flow out of the cavity through the outlet holes.

Growing community of inventors

Ilan, Taiwan

Shih-Che Lo