Texas Instruments Corporation

Shih-Chang Chang

Bhaskar Srinivasan

Abbas Ali

Guruvayurappan Mathur

Poornika Fernandes

Shariq Arshad

Darrell R Krumme

Joao Sergio Afonso

In some examples, an integrated circuit includes an isolation layer disposed on or over a semiconductor substrate. The integrated circuit also includes a first conductive plate located over the isolation layer and a composite dielectric layer located over the first conductive plate. The composite dielectric layer includes a first sublayer comprising a first chemical composition; a second sublayer comprising a second different chemical composition; and a third sublayer comprising a third chemical composition substantially similar to the first chemical composition. The integrated circuit further includes a second conductive plate located directly on the composite dielectric layer above the first conductive plate.

Integrated circuits including composite dielectric layer

Growing community of inventors

Allen, TX, United States of America

Shih-Chang Chang