Hitachi, Ltd.

Hitachi-high-technologies Corporation

Hitachi Construction Machinery Co., Ltd.

Shigeyuki Hosoki

Sumio Hosaka

Tsuyoshi Hasegawa

Keiji Takata

Masakazu Ichikawa

Atsushi Kikugawa

Yukio Honda

Makiko Kohno

Yusuke Yajima

Masaaki Futamoto

Eiichi Murakami

Ushio Kawabe

Mikio Ichihashi

Yoshihisa Fujisaki

Hajime Aoi

Toshiyuki Aida

Ryo Imura

Kiyokazu Nakagawa

Fumihiko Uchida

Shigehiko Yamamoto

Shigeo Kato

Sumiko Fujisaki

Tsutomu Komoda

Hiromichi Shimizu

Shunji Maeda

Hideo Todokoro

Mitsugu Sato

Tadashi Ikeda

Yuji Takagi

Yoshimi Kawanami

Hitoshi Kubota

Tohru Ishitani

Yoshinori Nakayama

Hiroyuki Kobayashi

Hiroshi Okano

Akira Shimase

Yoshio Takahashi

Ryo Miyake

Hiroshi Takeuchi

Hifumi Tamura

Satoru Fukuhara

Toshio Katsuyama

Masahide Okumura

Shigeru Nishimatsu

Tatsumi Mizutani

Masatoshi Ohtake

Ryo Haruta

Eiichi Hazaki

Toshiyuki Usagawa

Osamu Yamada

Fumikazu Itoh

Satoshi Haraichi

Hiroshi Kakibayashi

Hiroyasu Kaga

Akira Hashimoto

Kuniyasu Nakamura

Chusuke Munakata

Hajime Koyanagi

Hiroshi Tooyama

Kanji Tsujii

Yasushi Nakaizumi

Hitoshi Nakahara

Yasuharu Hirai

Hironobu Matsui

Yoshimasa Kondo

Susumu Kawase

Keiji Takada

Toshiyuki Morimura

Hitoshi Kondou

Shiji Okazaki

A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.

Bio electron microscope and observation method of specimen

A method of observing an electric defect inside a solid sample directly by observing the situation in which conduction electrons are scattered inside the solid sample and means for realizing the method are described. A thin film electrode 2 is arranged opposite to the surface of the solid sample 1 with a minute gap, potential difference is applied between the solid sample 1 and the thin film electrode 2 by a gap voltage supply 7, conduction electrons inside he solid sample 1 are extracted outside the sample 1 by tunnel effect, and an electronic image by these extracted electrons is formed and displayed using an electronic optical system 5. By observing said electronic image, the situation of scattering of conduction electrons inside the solid sample 1 can be known and further, the information of an electric defect inside the solid sample 1 can be obtained.

Electron microscope and sample observing method using the same

Method and apparatus for forming microstructure body

In a measuring method and a measuring apparatus which are suited for observing a dynamic physical phenomenon particularly in a microdevice, a signal for generating a physical phenomenon in a specimen is inputted to the specimen, and a signal which is caused by this dynamic physical phenomenon is detected by a probe which is close to or in contact with the specimen surface in correspondence with a signal input to the specimen on the basis of the specific time. The measuring apparatus has a scanning probe microscope with a probe (tip) which is close to or in contact with the specimen surface, a pulse voltage application control unit for applying respective pulse voltages to the specimen and probe, and a signal measuring unit for measuring a signal from the specimen detected by the probe. The measuring apparatus causes a dynamic physical phenomenon in the specimen by applying the pulse voltage to the specimen, applies a bias voltage between the probe and specimen by applying the pulse voltage to the probe, and detects the signal caused by the dynamic physical phenomenon in the specimen. Pulse voltage application to the probe is executed by the pulse voltage application control unit in correspondence with pulse voltage application to the specimen on the basis of the specific time. A dynamic physical phenomenon in a microarea of a specimen which is caused by the particle property or wave property of electrons can thus be observed.

Method and apparatus for dynamic observation of specimen

A fine-fabrication method of solid surfaces relates to a new surface fabrication method allows a solid-device surface to be fabricated at an atomic scale so as to produce an ultra-fine device or a device for recording information at an ultra-high density. A probe is installed with a tip thereof facing to the surface of a specimen to undergo fabrication. A voltage for forming an electric field is applied between the probe and the specimen. The electric field is large enough to field-evaporate atoms constituting the specimen or the probe; the electric field field-evaporates atoms constituting the specimen, removing them from the surface of the specimen; and as another alternative, the electric field field-evaporates atoms constituting the probe, depositing them on the surface of the specimen. Further, in another surface atom fabrication method, while the surface of a specimen is observed at an atomic scale using a surface observation technique by means of a scanning tunnelling microscope, a pulsative voltage large enough for the field evaporation of atoms described above is applied between the probe and the specimen at any arbitrary desired positions on the surface of the specimen; and the pulsative voltage field-evaporates and, hence, eliminates atoms one by one from the surface of the specimen.

Surface atom fabrication method and apparatus

An apparatus for measuring physical properties of micro area which has an object to measure physical properties from a micro area on an atomic scale on the surface of a test sample such as electron spin, nuclear magnetic moment, and nuclear quadrupole moment in high sensitivity, allows the probe 2 of the atomic force microscope to approach the surface of the test sample 1, applies a magnetic field to the test sample 1 by the magnetic field generation coil 27 and the magnetic paths 22 to 26 and furthermore a high frequency electromagnetic field to the test sample 1 by the coils 16 and 17 respectively, and detects a signal from atoms existing on the surface of the test sample 1 which are resonant with the high frequency electromagnetic field by the probe 2.

Apparatus for measuring physical properties of micro area

An apparatus for measuring an electromagnetic field distribution using a focused electron beam can measure the electromagnetic field distribution in a specimen with high resolution and high reliability. A focused electron beam radiation system irradiates a specimen with a focused electron beam. A specimen tilt mechanism tilts a specimen by 180.degree. about a tilt axis that is perpendicular to the optical axis of the focused electron beam. An electron beam position detector measures the direction and quantity of the deflection given to the focused electron beam when it is transmitted through the specimen. Further, a processing system calculates the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted, from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Thus, an electric field and a magnetic field in a specimen can be separately observed independently of each other.

Apparatus including a specimen tilt mechanism for measuring

A surface observing apparatus for obtaining information of a specimen comprises a probe disposed in the close vicinity of the specimen, a deformable cantilever for holding the probe, a scanning mechanism for scanning a surface of the specimen with the probe and a detector for detecting displacements of the cantilever to thereby allow information of the specimen to be derived on the basis of the displacement of the cantilever. The apparatus further comprises a first detector for detecting a force acting on the probe from the displacement of the cantilever, and a second detector for measuring a change in the force acting on the probe on the basis of the displacement of the cantilever.

Surface observing apparatus and method

A scanning tunneling microscope, in which the gap between a tip having a keenly sharpened end and a sample is narrowed to let flow a tunneling current between them and thereby allow observation of the surface of the sample, a strain wave detecting device is disposed on the sample or in the vicinity of the sample to detect strain waves generated within the sample. By modulating the value of the above described tunneling current, strain waves are generated within the sample. The strain waves are detected by the above described strain wave detecting device. On the basis of the amplitude information and phase information of detected strain waves, physical information regarding the inside of the sample is obtained.

Surface measuring apparatus using a probe microscope

Magnetic electron lens and elctron microscope using the same

A scanning tunnel microscope comprising: a SEM stage provided in a specimen chamber of a SEM and having a mechanism for moving in a two dimensional manner along a surface perpendicular to an electron beam; a specimen stage provided on the SEM stage and provided with a mechanism for holding a specimen so that a surface of the specimen makes an angle of 45.degree. with the electron beam and for moving the specimen in a two dimensional manner in directions of the specimen surface; an STM scanning mechanism provided on the SEM stage and provided with a probe held perpendicularly to the specimen surface, a coarse movement mechanism for making the probe approach to a position at a desired distance from the specimen surface, and a probe fine movement mechanism for making the probe scan along the specimen surface; and a display unit for displaying an image by the SEM together with an image of the probe on the basis of signal obtained from a secondary electron detector provided in a specimen chamber and for displaying an image by the STM on the basis of signals from the probe fine movement mechanism.

Scanning tunnel microscope equipped with scanning electron microscope

A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.

Combination apparatus having a scanning electron microscope therein

A scanning tunneling microscope, in which the gap between a tip having a keenly sharpened end and a sample is narrowed to let flow a tunneling current between them and thereby allow observation of the surface of the sample. A strain wave device is disposed on the sample or in the vicinity of the sample to detect strain waves generated within the sample. By modulating the value of the above described tunneling current, strain waves are generated within the sample. The strain waves are detected by the above described strain wave detecting device. On the basis of the amplitude information and phase information of detected strain waves, physical information regarding the inside of the sample is obtained.

Tunnelling acoustic microscope

In a surface topographic observation method using a scanning tunneling microscope, a probe is moved away from the surface of a sample and is moved on a plane to successively move it to points of measurement on the surface of the sample in order to obtain texture information of the sample. That is, the probe is moved on a plane completely preventing the probe tip from colliding with the surface of the sample and enabling the probe to effect scanning at high speeds.

Scanning tunneling microscope and surface topographic observation method

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Hachioji, Japan

Shigeyuki Hosoki