Horiba, Ltd.

Kyoto University

S-Tec Corporation

Mitsubishi Corporation

Nippon Instruments Corporation

Masa International Corp.

Horiba Co. Ltd.

Shigeyuki Akiyama

Masahiko Fujiwara

Takuji Oida

Satoshi Inoue

Naohito Shimizu

Toshihiko Uno

Aritoshi Yoneda

Hiroo Matsumoto

Fujio Koga

Hiroyuki Harada

Yusuke Mizuno

Toshikazu Ohnishi

Riichiro Suzuki

Masahiko Ishida

Junji Kato

Masahiko Endo

Yu Tanaka

Yoshihiro Kubo

Tatsuhide Tsutsui

Atsushi Yamamoto

Tomomichi Oka

Tetuo Shimizu

Koji Ishikawa

Norikazu Iwata

An NDIR gas sensor has high responsiveness and less noise and includes a radiating section arranged to radiate an infrared ray, a detecting section arranged to detect the infrared ray radiated by the radiating section, and a sample cell extending between the radiating section and the detecting section along a route of the infrared ray and covering the entire circumference of the route of the infrared ray. The sample cell includes a plurality of cell elements extending along the route of the infrared ray. Side portions of the cell elements adjacent to each other overlap at an interval from each other.

NDIR gas sensor, gas analyzer, photosynthesis rate measuring apparatus, and photosynthesis rate measuring method

This invention provides a zero gas refiner for COconcentration measurement device that can continuously refine a zero gas that is preferable for COconcentration measurement. This invention adopts the zero gas refiner comprising a water adsorbent and a COadsorbent that desorb an adsorbed component and restore an adsorption ability by being heated to a predetermined restoration temperature, a refiner body that adsorbs water and COin an introduced sample gas or air in this order by the use of the water adsorbent and the COadsorbent housed inside of the refiner body so as to refine a zero gas and that leads out the zero gas, and a heating mechanism that applies heat to the refiner body at a time when the adsorption ability of the water adsorbent or the COadsorbent drops to an amount that is less than or equal to a predetermined amount.

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A stack-gas measuring apparatus includes a sample introducing unit (sampling unit and heating conduit pipe) for introducing stack-gas, a cooling unit (containing wet filter) in which dust components in the stack-gas are agglomerated, a filter column containing a filter element made of a polymer material for collecting the dust components, a mist scrubber which is disposed downstream of the filter column and which contains an adsorbent for removing acid mist in the stack-gas, and an analyzer in which the cleaning-processed gas is introduced to measure a particular component in the stack-gas.

Stack-gas measuring apparatus and stack-gas measuring method

The present invention relates to a catalyst for reducing mercury, which comprises a reagent comprising any of the sulfites of potassium, sodium, calcium and magnesium, or any of the phosphates thereof, or a combination of them, as a main reagent of a catalyst component. And the present invention relates to the catalyst for reducing mercury, wherein the catalyst component is mixed with a different salt as an agent for inhibiting crystallization of the catalyst component.

Catalyst for reducing mercury, a mercury conversion unit, and an apparatus for measuring total mercury in combustion exhaust gas by using the same

This invention relates to a multi-component absorbance monitor, and the object is to provide a general-purpose and highly accurate compact absorbance monitor. Disclosed is an absorbance monitor including a light source, a sample cell and a plurality of detectors as elements, wherein a light collecting member is arranged between the light source and one detector, and an inside wall of the light collecting member has a site for guiding a part of light from the light source, that is, a light guiding opening, and light from the light guiding opening enters another detector. Preferably, the light collecting member lies between the light source and the sample cell. Preferably, an optical element used for another detector described above is arranged in the light guiding opening and adjacently to a light path formed by the light collecting member.

Absorbance monitor

The present invention provides a NOx-concentration measuring apparatus D for quantitatively analyzing the concentration of NOx contained in a sample gas. The measuring apparatus D comprises a sampling probe for obtaining the sample gas, a drain separatorfor condensing moisture contained in the sample gas as a condensed water and separating the condensed water from the sample gas, an NOconverterfor converting NOcontained in the sample gas into NO, a secondary cooling devicefor additionally cooling the sample gas, and an NO analyzer, arranged in this order with respect to a sample-gas line of the NOx-concentration measuring apparatus. The drain separator is a high-flow-velocity cooling type drain separator. Further, the sample-gas line between the sampling probe and the drain separator is heated and/or thermally insulated over the entire length thereof. The measuring apparatus can provide a high-precision measurement while suppressing NOloss.

NOx-concentration measuring apparatus

A method of measuring gas component Concentrations of special material gases for semiconductor, and a semiconductor equipment are provided. The method and apparatus can be incorporated in a gas pipe line system in an inline manner, and measure the component and concentration of a gas flowing through a gas pipe line or a gas with which the gas pipe line system is filled, thereby eliminating any erroneous connection. In the method of measuring gas component concentrations of special material gases for semiconductor, as means for attaining the objects, an infrared gas detector is disposed in a gas pipe line between a gas cylinder containing a special material gas for semiconductor and a semiconductor producing section, so that the gas component and concentration are measured in an inline manner. An apparatus for supplying special material gases for semiconductor is also provided. In the apparatus, a monitor for monitoring a gas component, a concentration, a flow rate, and the like is incorporated in a gas pipe line system from a gas cylinder storing room to a semiconductor equipment, so that any accident such-as erroneous connection, erroneous piping, or erroneous exchange is prevented from occurring. As means for attaining the object, a massflow controller is disposed in each of pipe lines connected to a plurality of gas cylinders containing special material gases for semiconductor, and an infrared gas sensor functioning as an inline gas monitor is disposed in a pipe line between a junction point of the pipe lines and the semiconductor equipment. The massflow controllers and the infrared gas detector are connected to a control apparatus for the apparatus for supplying gases for semiconductor, and the respective output signals are checked. The supply of the gases is controlled in accordance with the agreement or disagreement of the signals.

Method of measuring gas component concentrations of special material

A gas analyzing apparatus includes a sample gas line with a sample line valve for providing a sample gas, and a reference gas line with a reference line valve for providing a reference gas. A first gas analyzer is connected to the sample line downstream of the sample line valve, and a second gas analyzer is connected to both the sample and reference gas lines downstream of the valves. The lines are configured such that sample gas and reference gas may be alternately provided to the second gas analyzer either directly or indirectly via the first gas analyzer.

Gas analyzing apparatus

A gas analyzer has a simple composition and can measure multi-components at a high accuracy. A plurality of measuring cells, including a case where the cells are different in length from each other, communicate sequentially with each other through a communication part to form a single gas path. A cut-on filter as an infrared penetration/reflection means for diffracting spectrally an infrared wavelength is provided on a light source side. A NO.sub.X measuring cell 3 having a cell length of about 60 mm and a CO.sub.2 measuring cell 7 having a cell length of about 1 mm which communicate through the communication part with each other, and a capacitor microphone (an infrared-ray detector for NO.sub.X) and a pyroelectric detector (an infrared-ray detector for CO.sub.2) are provided on the infrared penetration and reflection sides of the optical filter.

Gas analyzer

An ultraviolet light source is provided on one end of a cell into which a sample gas is introduced. A beam splitter for dividing beams which have been transmitted through the cell into two optical paths is provided on the other end of the cell. A first detector is provided in one optical path, and a second detector is provided in the other optical path. A gas filter filled with a component to be measured is positioned between the detectors and beam splitter so that a concentration of the component to be measured may be obtained on the basis of a difference between the output of the first detector and the product of the output of the second detector and an appointed constant. Influences resulting from components coexisting in the sample gas are reduced. Alternatively, an infrared light source may be provided on one end of a sample cell. A gas filter filled with a gas the same as the gas to be measured is provided at the other end of the sample cell. A reference filter filled with a non-absorbing gas is positioned parallel to the gas filter. A beam splitter and a detector are sequentially disposed downstream from the gas filter, and a mirror is disposed downstream from the reference filter. The mirror is positioned such that beams which passed through the reference filter may be directed to the beam splitter and, subsequently, the detector.

A gas analyzer capable of simultaneously detecting two or more components in a single-cell mode and a gas-analyzing mechanism suitable for simultaneously detecting two or more components in a cross-flow modulation single-cell mode are provided. A gas analyzer unit includes two measuring cells, light sources provided on one end side of each of the measuring cells, gas filter cells with interferential gaseous components hindering a detection of components to be measured enclosed provided on the other end side of each of the measuring cells, beam splitters included in two gas filter cells, first- and fourth and second- and third detectors provided on the side of transmitting position and the side of reflecting position, respectively, of each of the beam splitters and a sampling device connected with a rotary valve.

Gas analyzer and gas-analyzing mechanism

An improved detector assembly of an electro-magnetic conduction-type conductivity meter includes a plastic housing member having a liquid sample flow path extending therethrough. An excitation transformer is mounted in a cavity of the housing member along with the detection transformer for respectively inducing a current flow and detecting a current flow in the liquid sample flow path. A porous electrode is positioned adjacent one of the transformers and insulated by hydrophilic paper so that the entrance of any fluid within the cavity can be detected.

Leak detector for electro-magnetic induction-type conductivity meter

In an improved electromagnetic induction-type conductivity meter utilizing primary and secondary transformer coils about a liquid sample passageway, a resistance circuit having a conductive lead line extending also through the coils and parallel with the sample passageway is provided. The resistance circuit can be selectively opened and closed, and has the capacity to contribute to the measurement voltage detected on the detector coil when the primary coil is excited. The value of this additional resistance voltage can be used for calibration and monitoring the condition of the conductivity meter.

Electromagnetic induction-type conductivity meter with improved

An improved detector assembly with an electromagnetic induction-type conductivity meter is provided with a pair of housing members forming a first liquid sample flow path at a central location, and a second liquid sample flow path on their outer circumference. An excitation coil and a detection coil extend about the first liquid sample path, while the second liquid sample flow path interconnects with the first liquid sample flow path both upstream and downstream of the respective coils. The second liquid sample flow path can substantially extend about the coils so that a relatively large induction current can be generated and measured as representative of the liquid sample.

Detector assembly for an electromagnetic induction-type conductivity

An improved apparatus for measuring fine particles in a liquid includes a nozzle for spouting water from within one end of a cell towards an opposite end thereof. An incident light beam traverses the spouted water to scatter light towards a light detection system exteriorly of the cell. The detection system includes a stop for excluding scattered light from being detected and which resulted from fine particles outside a central portion of the spouted liquid.

Growing community of inventors

Kyoto, Japan

Shigeyuki Akiyama