Shin-etsu Handotai Co., Ltd.

Shigeyoshi Nezu

Michito Sato

Tatsuo Enomoto

A wafer etching apparatus for etching wafers provided with an orientation flat, composed of a casing, at least five horizontal, parallel and rotative rollers having annular engagement grooves arranged at regular intervals in the axial direction to receive and support wafers vertically, and a press rod means, wherein the rotative rollers are arranged such that the rollers cooperate to circumscribe the wafers, and that when the orientation flat faces any one of the rollers the rest of the rollers cooperate to hold the wafer so as to prevent the orientation flat from coming in contact with the facing roller.

Growing community of inventors

Selangor, Malaysia

Shigeyoshi Nezu