Edwards Japan Limited

Shigeyoshi Nakatsuji

Yoshiyuki Sakaguchi

A vacuum pump includes a casing having an inlet port, and enclosing a rotating body, a thread groove stator which is substantially cylindrical and is disposed on an outer periphery of the rotating body, and a thread groove which is formed in at least one of an outer peripheral surface of the rotating body and an inner peripheral surface of the thread groove stator, the vacuum pump exhausting gas sacked from a side of the inlet port to outside of the casing by rotating the rotating body, wherein a binding means, which is formed of a material having a linear expansion coefficient lower than a linear expansion coefficient of a material of the thread groove stator and reduces radial deformation at a time of thermal expansion of the thread groove stator, is disposed on an outer periphery of the thread groove stator.

Growing community of inventors

Chiba, Japan

Shigeyoshi Nakatsuji