Kabushiki Kaisha Akashi Seisakusho

Shigetomo Yamazaki

Akira Onoguchi

Masahiro Inoue

Mitsuhisa Miyazawa

The specification describes a scanning electron microscope or similar equipment having a tiltable microscope column so as to observe a specimen at different angles without inclining the specimen. In order to make the microscope column tiltable relative to its specimen chamber, an opening is formed through a wall portion of the specimen chamber. The opening is covered up by a movable cover. A lower portion of the microscope column extends through the cover into the specimen chamber. A sealing member is provided so as to surround the opening between the wall portion and cover to ensure the hermetic sealing therebetween. Since the microscope is tilted instead of inclining the specimen stage to obtain images of the specimen seen at different angles, the specimen stage can be simplified in both structure and mechanism. The specimen stage is thus kept stationary, resulting in a complete solution to vibrations caused by conventional specimen stages and in a substantial improvement to the resolution of scanning electron microscope and similar equipment.

Scanning electron microscope or similar equipment with tiltable

The specification describes a scanning electron microscope or similar equipment having a magnetic pole piece detachably provided in an opening of a lower pole of its electromagnetic objective lens so as to decrease the magnetic flux leaked through the opening when the specimen is placed below the lower pole. The above scanning electron microscope or similar equipment may also include a change-over system for varying the crossing point between a scanning charged particle beam and an optical axis depending whether the specimen is placed in the vicinity of the lens center of the objective lens or below the lower pole. Accordingly, the specimen can be placed either below the lower pole of the objective lens or in the vicinity of the lens center as the operator desires, thereby making the scanning electron microscope or similar equipment applicable for varied purposes. Owing to the provision of the change-over system, a specimen image of good quality can always be obtained even if the specimen is placed at different locations.

Scanning electron microscope or similar equipment

The specification describes a scanning electron microscope or similar equipment capable of irradiating a plurality of beams of charged particles onto a specimen and displaying simultaneously the plurality of images of the specimen. It comprises charged particle beam modulation means to modulate the intensities of the beams of charged particles through their deflection by different frequencies, a detector capable of detecting secondary electrons or the like given off from the specimen, demodulation selector means capable of demodulating signals from the detector and selecting each specimen image signal, and display means capable of displaying the plurality of images of the specimen. The plurality of beams may be irradiated in parallel onto different spots on the specimen or may be directed to one specific spot on the specimen. Thus, a plurality of specimen images can be displayed extremely efficiently and, also, simultaneously by simple means.

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Hachioji, Japan

Shigetomo Yamazaki