Sony Corporation

Shigeto Watanabe

Koji Suzuki

Kazuo Takahashi

Junichi Honda

Teruo Inaguma

Shin Sasaki

Manabu Aizawa

Eiji Nakashio

Kazuo Kurihara

Toru Matsunaga

Yoshinori Satoh

Toshiyuki Kawamura

Hidetoshi Kabasawa

A sensor device includes a sensor element; and a wiring substrate having a first joint surface electrically joined with the sensor element, a substrate body that contains an organic insulating material and in which an electronic component is embedded, and a regulation part that regulates the first joint surface from deforming.

Sensor device regulation and related systems and methods

A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.

Vibrating gyrosensor driven with offset potential

To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensoraccording to the present invention includes a supporting substrate, which has a circuit element mounted thereon and a wiring pattern having a plurality of landsdisposed thereon; and a vibration elementmounted on a surface-of the supporting substrate. The vibration elementincludes a base portionhaving a mounting surface-provided with a plurality of terminalsthat are connected to the lands; and a vibrator portionextending integrally from a side of the base portionin a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion, the substrate-facing surface being provided with a first electrode layer, a piezoelectric layerstacked on the first electrode layer, and a second electrode layerstacked on the piezoelectric layer. The vibration elementis mounted on the supporting substrateby joining the terminalsto the landswith metallic projectionsdisposed therebetween.

Vibratory gyrosensor having a vibration element provided with terminals

A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.

Vibrating gyrosensor

An angular rate sensor includes: a quadratic prism-like oscillatorformed by laminating a substrateand a piezoelectric material; a reference electrodewhich is formed on one main surfaceA of two opposed surfaces of the piezoelectric material, the one main surfaceA being bonded to the substrate, and which is connected to a reference potential; at least one drive electrodewhich is formed on the other main surfaceB of the two opposed surfaces of the piezoelectric materialin the longitudinal direction of the oscillator, and to which a signal for oscillating the oscillatoris supplied; and at least a pair of detection electrodesandwhich are formed, in parallel with each other, on the other main surfaceB of the two opposed surfaces of the piezoelectric materialin a manner to sandwich the drive electrode, and which output a signal corresponding to Coriolis force generated in the oscillator

Angular rate sensor

An angular rate sensor includes a quadratic prism-like oscillatorformed by laminating a substrateand a piezoelectric material, the piezoelectric materialis made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrateis made of a material other than PZT having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young's modulus, thermal expansion coefficient, and the like.

Growing community of inventors

Miyagi, Japan

Shigeto Watanabe