Mitsui Chemicals, Inc.

Shigeto Shigematsu

Takashi Nakano

Tadahiro Sunaga

Yoshihiro Yamamoto

Kazumori Kawamura

Takashi Ochiai

Hirofumi Io

Hiroshi Kouno

Tomoyuki Morita

The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 &#x3bc;mat 157 nm of ultraviolet rays.wherein Rto Rare each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; Xis &#x2014;CRR&#x2014;, &#x2014;NR&#x2014; or &#x2014;PR&#x2014; (Rand Rare each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, &#x2014;O&#x2014;, &#x2014;S&#x2014;, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of Rto Rand Xis fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.

Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same

A pellicle that excellently transmits ultraviolet rays and, particularly, vacuum ultraviolet rays, does not lose the film thickness thereof that stems from the photolysis and, hence, exhibits excellent light resistance. The pellicle is obtained by using, as a material of pellicle film, an impurity-free organic polymer obtained by treating an organic polymer to remove at least a portion of at least any one of, preferably, a majority portion of trace amount-metal components, high molecular components and incomplete molecular structure components contained in the organic polymer. The invention further provides a method of preparing a pellicle.

Pellicle, method of preparing the same and exposure method

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Yamaguchi, Japan

Shigeto Shigematsu