Canon Kabushiki Kaisha

Shigeto Kamata

Akihiro Kimura

Kazuhiro Oki

Mitsutoshi Hasegawa

Yasuo Ohashi

Toshio Matsuki

Kazumasa Takatsu

Nobuhiro Ito

Kotaro Akutsu

Masateru Yasuhara

Masahiro Tagawa

Eiji Osanai

Takeshi Yakou

Toyoshige Sasaki

Akihiko Komura

Kazuhiro Ohki

Toshikazu Sakai

Kazuo Koyanagi

Masanao Yoshimura

Shingo Nagai

A hermetic envelope includes a first plate, a second plate, and a frame provided between the first plate and the second plate to form an interior space. A first bonding part is provided between the frame and the first plate to bond the frame and the first plate to each other, and a first abutting part is provided between the frame and the first plate, and positioned closer to the interior space than the first bonding part. A second bonding part is provided between the frame and the second plate to bond the frame and the second plate to each other, and a second abutting part is provided between the frame and the second plate and positioned closer to the interior space than the second bonding part. The second bonding part is positioned closer to the interior space than the first bonding part.

Hermetic envelope and image display apparatus using the same

A manufacturing method of a hermetically sealed container, comprises steps of placing, on a first member, a first bonding material and a second bonding material having a larger compressibility in relation to a pressing force than a compressibility of the first bonding material, such that the first and second bonding materials are arranged side-to-side relationship, and the first bonding material has a height lower than a height of the second bonding material; pressing a second member to the second bonding material; heating and melting sequentially part by part the first bonding material; and cooling the first bonding material to bond together the first and second members.

Hermetically sealed container and manufacturing method of image forming apparatus using the same

A manufacturing method of an image display apparatus, having a vacuum container with getters therein, includes the steps of exhausting an inner gas through an exhaust hole provided in the vacuum container; and activating the getters during the exhausting. In the activating step, the getters are sequentially activated first from a getter positioned in an area having a larger exhaust conductance with respect to the exhaust hole.

Manufacturing method of image display apparatus

An electron source producing apparatus for forming an electron-emission part on a conductive member disposed on a substrate in an atmosphere containing a desired gas. The apparatus includes a container for forming a hermetic atmosphere between the container and a surface of the substrate on which the conductive member is formed. The container has a gas inlet and a gas outlet. A diffusing member is for diffusing an introduced gas, and is disposed between the gas inlet and the surface of the substrate. A resisting member provides exhaust resistance, and is disposed between the gas outlet and the surface of the substrate and is separated from the gas outlet. The resisting member is disposed closer to the surface of the substrate than is the diffusing member.

Electron source producing apparatus and method

A heating/cooling method, a manufacturing method of an image displaying apparatus, a heating/cooling apparatus, and a heating/cooling processing apparatus, in which the heating and cooling of a substrate can be executed at a high speed are provided.

Heating/cooling method, manufacturing method of image displaying apparatus, heating/cooling apparatus, and heating/cooling processing apparatus

In an electron source manufacturing apparatus, the quantity of heat generated from an electron source substrate is measured. A temperature of a support member for the electron source substrate is controlled based on the measured quantity of heat generated. A variation in performances of electron source substrates is suppressed, which increase their life.

Electron source manufacturing apparatus and electron source manufacturing method

A method of effecting high temperature vacuum heating and cooling suitable for conducting heat treatment to be performed on components used in a display apparatus. The heating/cooling method includes the steps of: heating a plate-like member placed in a reduced pressure atmosphere in a chamber by heating means opposed to the plate-like member; and cooling the plate-like member by a cooling plate which is opposed to the plate-like member, with the heating means therebetween, the cooling plate having a heat reflecting function. The cooling plate has an emissivity of not less than 0.50 but not more than 0.80 so as to minimize a sum of a requisite time for the heating step and a requisite time for the cooling step.

Method of effecting heating and cooling in reduced pressure atmosphere

In an apparatus for performing heating treatment of a structure composed of a substrate and a structure arranged on the front surface of the substrate, the latter structure having thermal capacity smaller than that of the substrate, heaters are arranged to be opposed to the front surface and the back surface of the substrate. A cooling body is arranged at a position opposed to the back surface of the substrate to sandwich the heater of the back surface between the cooling body and the substrate.

Thermal treatment equipment, thermal treatment method and manufacturing method of image display apparatus

On the occasion of producing an image display apparatus, in order to suppress the bend and breakage of a substrate by uniformly heating the substrate which constructs a chamber which contains the image display apparatus, a plurality of heaters are located in opposition to both sides of the substrate in a vacuum chamber, which are further surrounded by a heat reflecting member, a partitioning member is located between end faces of the substrate and the heat reflecting member, and the substrate is heated.

Heating method, heating apparatus, and production method of image display apparatus

A voltage applying apparatus including a holder, a probe and the like as voltage applying means enabling the application of a voltage to electrode wiring connected with electric conductors formed on a substrate on which the electrode wiring is formed. The apparatus is equipped with aligning means making the position of the probe follow to the changes of the position of the electrode wiring to coincide with them. The aligning means makes the position of the probe follow the position of the electrode wiring so that the probe aligns the electrode wiring by the thermal expansion of the holder.

Voltage applying apparatus, and apparatus and method for manufacturing electron source

A probe for applying a voltage to lines provided on a substrate comprises (a) a conductive sheet, the conductive sheet including a mesh sheet in which linear members are woven into a mesh and a conductive material which coats the mesh sheet, (b) an elastic member for pressing the conductive sheet against the lines, and (c) a holding member for holding the conductive sheet and the elastic member together. The probe has improved electrical connectivity and durability, and achieves a reduction in size and facilitation of operations of an apparatus for manufacturing an electron source.

Method for manufacturing a substrate and a display device

Voltage-applying probe, apparatus for manufacturing electron source using the probe, and method for manufacturing electron source using the apparatus

A linear motor includes a magnet, a coil, and a jacket having an inside member that is comb-shaped having teeth, extending along a driving direction. The coil is engaged by the teeth of the comb-shaped member. A cooling medium flows through an inside space enclosed by the jacket. Unwanted deformation or breakage of the jacket can be avoided even if the pressure of the cooling medium is enlarged or the thickness of a small-thickness portion of the jacket is made smaller. A higher cooling efficiency is thus attainable by increasing the flow rate of the cooling medium.

Linear motor stage system for use in exposure apparatus

When an object to be heated is heated without temperature nonuniformity in its heated surface, unwanted thermal deformation can be suppressed, and thermal processing precision can be improved. For this purpose, a heat transfer plate for heating a plate-like object to be heated, and a base plate are stacked. A rod heater as a heat source is inserted in the heat transfer plate. The heat transfer plate has a larger thermal conductivity and smaller creep than the base plate.

Heating apparatus and method

A linear motor including a coil and a jacket which covers the coil and allows a cooling medium to be supplied through a space in the jacket. The jacket is made of an insulating material, such as a ceramic material or a high-polymer resinous material. The linear motor can include a reinforcing member in the jacket for strengthening the jacket against the pressure of the cooling medium. Also disclosed are a stage device, an exposure apparatus, and a device producing method using such a linear motor.

Growing community of inventors

Kanagawa, Japan

Shigeto Kamata