Other

Tokyo Electron Limited

Toshiba Ceramics Co., Ltd.

Shigeru Yamamura

Takanori Saito

Ken Nakao

Eiichi Toya

Tomio Konn

Norihiko Saito

Tomohiro Nagata

Toshiyuki Makiya

Hisaei Osanai

Hiroyuki Honma

Takeshi Inaba

Masahiko Ichishima

Kouji Teraoka

A rod-shaped heater provided is composed of a carbon wire heating element sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions and charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section having connection lines and for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

Heater

A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.

Carbon heater

Growing community of inventors

Oguni-machi, Japan

Shigeru Yamamura