Yamaha Corporation

Shigeru Shouji

Atsushi Toyoda

Shuichi Sawada

Masahiro Sugiura

A first resist mask is formed on a rail, covering an area where none of a shallow surface and a deep surface are formed. A first etching process is performed to etch the rail not covered with the first resist mask to a depth corresponding to the shallow surface. Next, without removing the first resist mask, a second resist mask is formed covering an area where the shallow surface is formed. A second etching process is performed to etch the rail not covered with the first and second resist masks, to a depth corresponding to the deep surface. After the first and second etching processes, the first and second resist masks are removed from the rail.

Fabrication of rail of magnetic head slider

On a substrate, a lower pole is formed being embedded in a protective film on which a gap layer is formed. On this gap layer, a first upper pole is formed facing the lower pole. A protective film is formed coplanar to the upper surface of the first upper pole. On this protective film, a coil made of a plurality of coil layers is formed being embedded in an insulating film. On the insulating film, an upper core layer is formed whose tip portion constitutes a second upper pole stacked upon the first upper pole and magnetically coupled thereto. The first upper pole formed before the coil is formed and the second upper pole formed after the coil is formed, constitute an upper pole.

Thin film magnetic head with special pole configuration

The leading edge of a lower pole is constituted by a protruded central parallel portion, opposite end parallel portions, and slanted portions coupling the central parallel portion and the opposite end parallel portions. The width T.sub.wc of the central parallel portion is set to 10 to 25% of the total width T.sub.wa of the lower pole. The thickness P1' of the opposite end portion is set in the range from 1/3 or thicker to 2/3 or thinner than the thickness P19 of the central parallel portion.

Thin film magnetic head with special shaped pole and manufacture method

The leading edge of a lower pole is constituted by a protruded central parallel portion, opposite end parallel portions, and slanted portions coupling the central parallel portion and the opposite end parallel portions. The width T.sub.wc of the central parallel portion is set to 10 to 25% of the total width T.sub.wa of the lower pole. The thickness P1' of the opposite end portion is set in the range from 3/1 or thicker to 3/2 or thinner than the thickness P1 of the central parallel portion.

Thin film magnetic head having a lower pole shaped to improve

A thin film magnetic head made of material having the magneto-resistance (MR) effect and its manufacturing method are provided. A lower shield layer for magnetically shielding an MR film is formed with a trench of a gull-wing shape having a flat bottom surface and opposite slanted surfaces formed on both sides of the bottom surface. The MR film is formed on the lower shield layer conformal to the gull-wing shape. The region of the MR film on the flat bottom surface forms an effective magnetic active region. A track center shift and the generation of a side-lobe in the off-track characteristic specific to an MR head can be suppressed and high density recording and reproducing of narrow tracks are possible.

Method of manufacturing a magneto-resistive reading head with reduced

A magneto-resistance type magnetic head having: a base; a longitudinal bias portion, formed over the base and having a first upper flat surface and a first slanted portion, for generating a longitudinal bias magnetic field; a lead portion laminated directly on the longitudinal bias portion so as to cover the first upper flat portion and to expose the first slanted portion of the longitudinal bias portion, wherein the lead portion is made of non-magnetic material and has a second upper flat surface and a second slanted portion, and wherein the first and second slanted portions collectively serve as a slanted surface; and a magneto-resistance material layer formed over the longitudinal bias portion and the lead portion, wherein the magneto-resistance material layer directly contacts an upper surface of the base and magnetically couples with the exposed longitudinal bias portion through the slanted surface of the longitudinal bias portion, wherein the magneto-resistance material layer is terminated on the slanted surface.

Magnetoresistive head having a magnetoresistive element with bent

A lower shield has an area smaller than an upper shield. A lead is constituted of a thin lead portion and a thick lead portion, the thin lead portion being formed in a reproduction gap between the upper and lower magnetic shield layers and the thick lead portion being formed spaced apart from the end of the lower magnetic shield layer in the depth direction and extending downward in the thickness direction at a level lower than the thin lead portion. The upper surface of the lead is not formed with a step. The thin and thick lead portions are connected via a contact hole formed through a lower reproduction gap layer.

Magnetoresistive thin film magnetic head with specific shapes of leads

Thin film magnetic heads each having non-parallel asymmetric rails are manufactured by, forming a multiplicity of thin film magnetic transducers on a substrate, for a matrix distribution of magnetic heads to be produced from the substrate; testing all the magnetic transducers and discriminating them into good ones and failed ones; assigning a rail pattern to each of the magnetic heads, which pattern utilizes a good magnetic transducer; severing the substrate into respective rows; polishing an air bearing surface on each row; forming a resist layer on the air bearing surface of each row; positioning the rows in an exposing apparatus; exposing the assigned rail pattern on the resist layer in each magnetic head region of each row.

Manufacture of magnetic heads having asymmetric air bearing surfaces

On a lower magnetic shield film, a lower gap film is formed on which a conductive lead film and a magnet film is laminated. The magnet film forms a bias permanent magnet film for generating a single magnetic domain of a magneto-resistance film. This lead film is trenched to the lower gap layer (20) to form a trapezoid trench and separated leads. A sensor unit having the magneto-resistance film is formed conformally to the trench and electrically connected to the separated leads. An upper gap is formed on the sensor unit (28), and an upper shield is formed on the upper gap.

Magneto-resistive reading head with two slanted longitudinal bias films

Method of making a magnetoresistive thin film magnetic head with

A lower pole gradually increases its thickness in a section from the pole front end surface toward the depth direction. An upper pole gradually increases its thickness in a section from the pole front end surface toward the depth direction. The lower pole has a constriction at an area deeper than the gradually increasing section.

Thin film magnetic head with pole having variable thickness

In an induction- and MR-type composite magnetic head of the type that one of two shield films of an MR-type magnetic head serves as one of two cores of an induction-type magnetic head, conductive leads are thicker than an MR element so that steps are formed at the boundaries between an MR element sensitive region and the conductive leads. An upper gap layer has a constant thickness and has a recess 56 on its upper surface because of topographical transfer of the underlying steps. An upper shield--lower core layer has a downward convex at its lower surface, because of topographical transfer of the recess on the upper surface of the upper gap layer. However, the upper surface of the upper shield--lower core layer is flat and parallel to the MR element. Therefore, a write gap layer formed thereon is made flat and parallel to the MR element. Steps of the write gap can be removed and a record density can be increased.

Growing community of inventors

Hamamatsu, Japan

Shigeru Shouji