Hamamatsu-Photonics K.k.

Other

Shigeru Sakamoto

Hirotoshi Terada

Ikuo Arata

Hiroshi Tanabe

Masaharu Tokiwa

Yoshio Isobe

Shinichiro Aoshima

Koji Kobayashi

Hironori Takahashi

Koei Yamamoto

Yoichi Kawada

Haruyasu Ito

Masatoshi Fujimoto

Yukio Ueda

Katsuhiko Sato

Toru Hirano

Shingo Oishi

Hideo Takahashi

Keiji Suyama

Toshihiko Mizuno

Tamotsu Tamada

Kazunori Nomi

Toshiyuki Tanaka

Koji Yamanaka

Nobuhiro Morita

Seiichiro Hashimoto

Tokuhiko Miki

Akira Obana

Hideaki Niwa

Toshiharu Moriguchi

The present invention provides an optical amplifying device which can be easily downsized, increased in output, and stabilized. An optical amplifying deviceA includes an optical amplifierA and an energy supplier. The optical amplifierA includes an optical amplifying mediumand a transparent medium. The energy suppliersupplies excitation energy (for example, excitation light) to the optical amplifying medium. The optical amplifying mediumis supplied with the excitation light to amplify light and output it. To-be-amplified light passes through the transparent mediumin the optical amplifying mediuma plurality of times. The transparent mediumcan propagate the to-be-amplified light, for example, zigzag inside.

Optical amplifying device

For a semiconductor device S as an inspected object, there are provided an image acquisition part, an optical systemincluding an objective lens, and a solid immersion lens (SIL)movable between an insertion position including an optical axis from the semiconductor device S to the objective lensand a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SILis located at the standby position and in which focusing and aberration correction are carried out based on a refractive index nand a thickness tof a substrate of the semiconductor device S, and a second mode in which the SILis located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index nand thickness tof the substrate, and a refractive index n, a thickness d, and a radius of curvature Rof SIL. This provides a microscope and a sample observation method capable of readily performing observation of the sample necessary for an analysis of microstructure or the like of the semiconductor device.

Microscope and sample observation method

It is an object to provide an optical component holding unit whereby the positioning accuracy can be improved while reducing cost through facilitated assembling and ensuring reproducibility. The fitting between a cross-sectionally noncircular-shaped rectangular convex portionand a rectangular hole and the fitting between a cross-sectionally circular-shaped circular convex portionand a circular hole, which surround or form opening portionsandfor allowing passage of light, guide adjacent optical component holding unitsto predetermined positions and couples the units detachably to each other for positioning in the three-dimensional direction, while the fitting between the rectangular convex portionand the rectangular hole and the fitting between spring pinsand fitting holes restrain the adjacent optical component holding unitsrelatively in the rotation direction for positioning in the rotation direction.

Optical part holding unit

A solid immersion lenscomprises a spherical portionand a bottom surface portion. The bottom surface portionis attached in close contact with a substrateof a semiconductor device to be an observed object. The bottom surface portionof this solid immersion lensis formed in a cylindrical shape. Thereby, a solid immersion lens which can be easily separated from the observed object after an observation and can, during an observation, allow a light flux with a high NA to pass and a microscope using the same can be obtained.

Solid immersion lens and microscope

Optical contact liquid containing an amphipathic molecule is dripped onto a semiconductor device which is a sample as an inspection object (S), and a solid immersion lens is set thereon (S). The inserted position of the solid immersion lens is then adjusted (S). The optical contact liquid is then dried (S), and thereby the solid immersion lens is brought into optically-close contact with the semiconductor device. As a result, a sample observation method and a microscope or the like can be realized, in which the solid immersion lens can be easily aligned to a desired position on the sample, and the solid immersion lens can be securely brought into optically-close contact with the sample.

Sample observation method, microscope, and solid immersion lens, optical contact liquid used in the method

For a semiconductor device S as an inspected object, there are provided an image acquisition part, an optical systemincluding an objective lens, and a solid immersion lens (SIL)movable between an insertion position including an optical axis from the semiconductor device S to the objective lensand a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SILis located at the standby position and in which focusing and aberration correction are carried out based on a refractive index no and a thickness to of a substrate of the semiconductor device S, and a second mode in which the SILis located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index no and thickness tof the substrate, and a refractive index n, a thickness d, and a radius of curvature Rof SIL. This provides a microscope and a sample observation method capable of readily performing observation of the sample necessary for an analysis of microstructure or the like of the semiconductor device.

The present device is equipped with a measurement site holder that is constructed using a negative impression of the measurement site . As a result, variation in the measured values caused by the non-uniform distribution of components in the measurement site is reduced, so that variation in the measured values caused by variations in the light path length accompanying variations in the shape of the measurement site , and by variations in blood flow or the like that accompany differences in the contact pressure, can be reduced. Since living-body information and measurement parameters for the patient are recorded on a recording medium mounted on a measurement site holder for the exclusive use of the individual patient, the erroneous acquisition of living-body information for individual patients can be prevented, and reproducible measurements can be performed.

Noninvasion biological optical measuring instrument, measured portion holding device, and method for manufacturing the same

An ophthalmic treatment apparatus uses therapy and diagnostic laser light sources whose beams are deflected two-dimensionally via an optical deflector and a galvanomirror and directed on the eye fundus to produce a fundus image on a display monitor. A photosensitive substance that accumulates specifically in neovascular regions is administered to the patient to define the region where the neovascular tissues are located. When the region is to be treated, the therapy laser light source is activated and its intensity is amplified by a controller and a driver for driving a light modulator. This arrangement assures a reliable definition of the affected region and enables only the neovascular tissues to be destroyed or sealed off because the laser intensity can be amplified at the region concerned.

Ophthalmic treatment apparatus

Growing community of inventors

Hamamatsu, Japan

Shigeru Sakamoto