Tokimec Inc.

Shigeru Nakamura

Takeshi Hojo

Takao Murakoshi

Takafumi Nakaishi

Isao Masuzawa

Kazuaki Tani

Kazuteru Sato

Akihiro Cho

An electrostatic supporting type acceleration detecting gyro apparatus is formed as an active type so as to be able to positively cancel a displacement of a gyro rotor. Control DC voltages for generating electrostatic supporting forces and displacement detection AC voltages for detecting a displacement of gyro rotor are applied to electrostatic supporting electrodes, and mechanism control circuits detect displacement indicating voltage signals (P.sub.1A) through (P.sub.4B). A displacement of the gyro rotor and the control DC voltages applied to the electrostatic supporting electrodes are computed based on the displacement detection voltages (P.sub.1A) through (P.sub.4B) outputted from the mechanism control circuits.

Acceleration-detecting type gyro and manufacturing method thereof

This invention relates to a vibration-type gyro apparatus for measuring an angular velocity using the Coriolis force exerted on a tuning fork. The tuning fork has two vibrational members symmetric about a Z axis. The two vibrational members vibrate along Z axis and are displaced along a Y axis by the Coriolis force. Each of the two vibrational members includes a cantilevered tabular member arranged along an XZ plane and has a shape symmetric about the center axis thereof. Electrode sections are formed on the two sides of the vibrational members, and electrodes are formed in the internal space of a casing at positions corresponding to the electrode sections. The electrodes are arranged by being deviated outward or inward of the center axis of the vibration members with respect to the electrode sections. Each of the electrodes is supplied with a displacement detection AC voltage and a control voltage from a detection and drive circuit.

Vibration-type gyro apparatus for calculating angular velocity

An acceleration detection gyro apparatus is of the electrostatic supporting type. This gyro apparatus call be made inexpensive, long in life, excellent in durability and can be applied to a wide variety of fields. A gyro rotor (20) is supported relative to a gyro case (21) by an electrostatic supporting force in a non-contact fashion and rotated about the spin axis along the Z axis by a rotor driving system. The gyro rotor (20) is disk-shaped and constructed by forming metal thin film electrodes on both surfaces of a plate member made of preferably an insulating material. The gyro apparatus includes a slave control system for slaving a displacement of the gyro rotor (20) relative to the gyro case (21) in the Z-axis direction (spin axis direction) and a central position control system for slaving a displacement of the gyro rotor (20) in the X-axis and Y-axon directions.

Method of making a gyro apparatus

An acceleration detection gyro apparatus is of the electrostatic supporting type. This gyro apparatus can be made inexpensive, long in life, excellent in durability and can be applied to a wide variety of fields. A gyro rotor (20) is supported relative to a gyro case (21) by an electrostatic supporting force in a non-contact fashion and rotated about the spin axis along the Z axis by a rotor driving system. The gyro rotor (20) is disk-shaped and constructed by forming metal thin film electrodes on both surfaces of a plate member made of preferably an insulating material. The gyro apparatus includes a slave control system for slaving a displacement of the gyro rotor (20) relative to the gyro case (21) in the Z-axis direction (spin axis direction) and a central position control system for slaving a displacement of the gyro rotor (20) in the X-axis and Y-axis directions.

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Kuroiso, Japan

Shigeru Nakamura