Nikon Corporation

Ckd Corporation

Shigeru Morimoto

Tadahiro Kominami

Koji Tanaka

Masayuki Kouketsu

Akihiro Ito

Katsushi Nakano

Hiromitsu Yoshimoto

Shigeki Kageyama

A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member () and facing a flow passage () of a liquid for regulating temperature, and is provided with a coil unit () having at least a part thereof in contact with the liquid. The coil unit () is provided with a coil body (), a mold layer () that covers the coil body and holds it in specific form, and a liquid protection layer () that covers the mold layer () and has liquid protection properties.

Linear motor, stage apparatus, and exposure apparatus

A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.

Cooling structure for electromagnetic coil, and electromagnetic actuator

A linear motor is equipped with a coil body (), and a yoke () that supports a magnetism generating body () and that moves relative to the coil body (). The yoke () has a first portion () that is formed from a magnetic material and disposed based on the saturation state of the magnetic field, which is generated by the magnetism generating body (), in the yoke ().

Linear motor, stage apparatus and exposure apparatus

Growing community of inventors

Saitama, Japan

Shigeru Morimoto