Pioneer Electronic Corporation

Shigeru Kono

Chiharu Koshio

Kazumi Kuriyama

Kazuhiko Nagata

Yutaka Takasu

A flow processing system for processing disc-shaped articles such as discs to be used to produce video or audio disc masters, whereby a plurality of processing units for performing respectively different processing operations are combined into a single system in which each disc is moved only horizontally and in a continuously rotating condition, both during processing and while being moved between the processing units. In addition, the supporting structure of the processing units is implemented such as to produce no disturbances in a horizontally directed dust-excluding flow of air, to ensure maximum prevention of adherence of dust particles to the disc surfaces.

Flow processing system

An apparatus for detecting faults on the surface of a resist master disc and for measuring the thickness of the resist coating layer includes a single light source for generating a laser beam for inspection of the master disc, a first separator for separating the laser beam into a first laser beam which is used for the detection of faults, and a second laser beam which is used to measure the thickness of the resist coating layer. The second laser beam is further separated into two laser beams one of which is irradiated on the surface of the resist coated master disc at a given angle of incidence. The detection of faults on the surface of the master disc is performed by detecting a level change of the quantity of reflection light of the first laser beam from the resist master disc, and the measurement of the thickness of the resist layer is performed by using a ratio between quantities of two laser beams obtained from the second laser beam one of which is detected after being reflected by the surface of the resist master disc.

Growing community of inventors

Yamanashi, Japan

Shigeru Kono