Horiba, Ltd.

Shigeru Kakinuma

Satoshi Ohashi

Kentaro Nishikata

Yutaka Saijo

Junichi Aoyama

An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement. A sample measuring device in accordance with this invention is to measure light generated from a sample W by irradiating electron beams EB on the sample W, and comprises a electron optical column partthat converges the electron beams EB, and a light collecting mirror partthat is arranged between the electron optical column partand the sample W and that has an energy beam pathto pass the electron beams EB converged by the electron optical column partand to irradiate the electron beams EB on the sample W and a mirror facewhose focal point F is set on an axis of the energy beam pathand that collects the light L generated from the sample W by means of the mirror face, wherein the light collecting mirror partis supported by the electron optical column partso that the axis of the electron beams EB coincides with the focal point F.

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Kyoto, Japan

Shigeru Kakinuma