Hokuriku Electric Industry Co., Ltd.

Shigeru Hirose

Masato Ando

Yoshimitsu Motoki

Hiroyuki Sawamura

Tsutomu Sawai

Yoshiyuki Nakamizo

Takeshi Arikura

A semiconductor force sensor capable of preventing a diaphragm part from being broken and accurately measuring a force applied thereto in a direction orthogonal to the diaphragm part, wherein a force transmitting device for applying a measured force to the diaphragm part of a semiconductor force sensor element is formed of a sphere having a rigidity, and a through hole passing through an opposed wall part toward the diaphragm is formed in the opposed wall parts at a position opposed to the center part of the diaphragm part so that a part of the sphere can face the outside of the opposed wall part and stores a part of the remaining part of the sphere to allow the sphere to be moved only in a direction orthogonal to the diaphragm part and rotated on the center part of the diaphragm part.

Semiconductor force sensor

A semiconductor force sensor capable of preventing a diaphragm part () from being broken and accurately measuring a force applied thereto in a direction orthogonal to the diaphragm part (), wherein a force transmitting means for applying a measured force to the diaphragm part () of a semiconductor force sensor element () is formed of a sphere () having a rigidity, and a through hole () passing through an opposed wall part () toward the diaphragm () is formed in the opposed wall parts () at a position opposed to the center part of the diaphragm part () so that a part of the sphere () can face the outside of the opposed wall part () and stores a part of the remaining part of the sphere () to allow the sphere () to be moved only in a direction orthogonal to the diaphragm part () and rotated on the center part of the diaphragm part ().

An acceleration detecting device capable of permitting a weight, a diaphragm and a base to be precisely positioned on a casing of a measuring equipment or the like. The weight, diaphragm and base are integrally formed of a metal material into a single unit. An insulating casing is integrally formed while incorporating the single unit as an insert therein. The insulating casing has a recess defined by a side wall thereof, which is formed with a window for exposing a part of the base therethrough. The recess of the casing is closed with a metal cover member, which is mounted on the casing. The cover member is integrally provided with a contactor which is elastically forced against the base through the window. The base is electrically connected to ground terminals of terminal fitments.

Growing community of inventors

Toyama, Japan

Shigeru Hirose